{"title":"A key more-than-moore technology: CMOS-MEMS resonant transducers","authors":"Sheng-Shian Li","doi":"10.1109/NANO.2016.7751491","DOIUrl":null,"url":null,"abstract":"This paper presents the recent progress on CMOS-MEMS resonant transducers, including their applications, fabrication, performance, bottlenecks, and feasible solutions to address the existing issues. The MEMS/IC integration for sensors and actuators through the CMOS-MEMS technology will be emphasized. In addition, various transduction mechanisms employed in CMOS-MEMS will be introduced and compared with each other, showing a proper selection of actuation and sensing is key to achieving decent performance in a variety of application scenarios. Finally, a few implementations of signal processors and sensors via the CMOS-MEMS technology will be presented.","PeriodicalId":6646,"journal":{"name":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","volume":"29 1","pages":"456-459"},"PeriodicalIF":0.0000,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2016.7751491","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
This paper presents the recent progress on CMOS-MEMS resonant transducers, including their applications, fabrication, performance, bottlenecks, and feasible solutions to address the existing issues. The MEMS/IC integration for sensors and actuators through the CMOS-MEMS technology will be emphasized. In addition, various transduction mechanisms employed in CMOS-MEMS will be introduced and compared with each other, showing a proper selection of actuation and sensing is key to achieving decent performance in a variety of application scenarios. Finally, a few implementations of signal processors and sensors via the CMOS-MEMS technology will be presented.
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