Study of High-Precision Interferometer Dynamic Switching for TFT Long-Travel-Range Moving Stage

Abstract

Interferometer dynamic switching (IDS) is one of core technologies of long-travel-range moving stage of high-generation TFT scanner. The accuracy and repeat -ability of IDS have a major influence on the servo performance of moving stage, further, on the hierarchical overlay error of lithography machine. Zeroing model and dynamic switching strategy are of great significance to IDS. To solve IDS problem efficiently, in this paper, a novel zeroing model as well as a dynamic switching strategy have been proposed. Experiment results show that, the IDS error specification has been satisfied in both single and multiple IDS test scenarios by using our proposed method.