{"title":"Displacement-amplified dynamic varifocal mirror using mechanical resonance","authors":"Takashi Sasaki, Daiki Sato, K. Hane","doi":"10.1541/IEEJSMAS.134.253","DOIUrl":null,"url":null,"abstract":"We describe a displacement-amplified dynamic varifocal mirror using mechanical resonance. An electrostatically actuated varifocal mirror was fabricated from single crystalline silicon. The diameter and thickness of the mirror were 1 mm and 2 μm, respectively. The estimated ratio of the dynamic to the static displacement was about 50 in the vacuum range from 2 Pa to 50 Pa at the resonance. The laser beam focusing was also demonstrated using the varifocal mirror under the resonance operation.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1541/IEEJSMAS.134.253","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
We describe a displacement-amplified dynamic varifocal mirror using mechanical resonance. An electrostatically actuated varifocal mirror was fabricated from single crystalline silicon. The diameter and thickness of the mirror were 1 mm and 2 μm, respectively. The estimated ratio of the dynamic to the static displacement was about 50 in the vacuum range from 2 Pa to 50 Pa at the resonance. The laser beam focusing was also demonstrated using the varifocal mirror under the resonance operation.
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