Pub Date : 2013-12-01DOI: 10.1109/OMN.2013.6659076
A. Duduś, R. Blue, M. Zagnoni, D. Uttamchandani
We report for the first time a broadband variable optical attenuator employing a side-polished single-mode optical fiber integrated on an electrowetting-on-dielectric platform. This in-line fiber optic device has the advantage of no moving mechanical parts and lends itself to miniaturization.
{"title":"Side-polished fiber optofluidic attenuator based on electrowetting-on-dielectric actuation","authors":"A. Duduś, R. Blue, M. Zagnoni, D. Uttamchandani","doi":"10.1109/OMN.2013.6659076","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659076","url":null,"abstract":"We report for the first time a broadband variable optical attenuator employing a side-polished single-mode optical fiber integrated on an electrowetting-on-dielectric platform. This in-line fiber optic device has the advantage of no moving mechanical parts and lends itself to miniaturization.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75644419","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659031
J. Ohta, T. Noda, K. Sasagawa, T. Tokuda
This paper reviews recent advancement of micro CMOS imaging devices to measure brain neural activities in an un-tethered mouse. Three types of imaging devices have been developed: a fiber endoscope, a head-mountable imaging device, and a brain-implantable imaging device. Among them, a brain-implantable imaging device can realize to observe neural activity in deep brain regions of the brain, such as hippocampus. The detail device structure and characteristics are presented.
{"title":"Implantable micro CMOS imaging devices for biomedical applications","authors":"J. Ohta, T. Noda, K. Sasagawa, T. Tokuda","doi":"10.1109/OMN.2013.6659031","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659031","url":null,"abstract":"This paper reviews recent advancement of micro CMOS imaging devices to measure brain neural activities in an un-tethered mouse. Three types of imaging devices have been developed: a fiber endoscope, a head-mountable imaging device, and a brain-implantable imaging device. Among them, a brain-implantable imaging device can realize to observe neural activity in deep brain regions of the brain, such as hippocampus. The detail device structure and characteristics are presented.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79411091","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659055
W. Piyawattanametha
Progress toward early diagnosis of cancer would have important clinical benefits in reducing cancer mortality; thus, there is an important need to image cellular features of cancer in vivo and in real-time. In this paper, we describe a review of microelectromechanical systems (MEMS) scanner based endoscopic optical coherence tomography (OCT), two-photon (2P), and confocal imaging. These modalities can provide submicron- and micro-scale resolution to reveal both cells and molecular features of early cancer diagnosis.
{"title":"A review of MEMS scanner based endoscopic optical imaging probe","authors":"W. Piyawattanametha","doi":"10.1109/OMN.2013.6659055","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659055","url":null,"abstract":"Progress toward early diagnosis of cancer would have important clinical benefits in reducing cancer mortality; thus, there is an important need to image cellular features of cancer in vivo and in real-time. In this paper, we describe a review of microelectromechanical systems (MEMS) scanner based endoscopic optical coherence tomography (OCT), two-photon (2P), and confocal imaging. These modalities can provide submicron- and micro-scale resolution to reveal both cells and molecular features of early cancer diagnosis.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84388261","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659041
F. Zamkotsian, M. Canonica, P. Lanzoni, W. Noell
Next generation of multi-object spectrographs (MOS) in astronomy will use MEMS-based programmable slit masks. Large micromirror arrays with 2048 tiltable micromirrors were fabricated using bulk and surface micro-machining, and wafer level bonding for the assembly. Micromirror size is 100μm × 200 μm and they exhibit very good surface flatness. Mirror architecture as well as a large mechanical tilt angle of 25° lead to a high contrast device, in the order of 1000:1, large enough for objects and background rejection in the MOS field of view. Finally, the micromirrors could be successfully actuated before, during and after cryogenic cooling at 162K.
{"title":"High contrast, cryogenic, large micromirror array for multi-object spectroscopy","authors":"F. Zamkotsian, M. Canonica, P. Lanzoni, W. Noell","doi":"10.1109/OMN.2013.6659041","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659041","url":null,"abstract":"Next generation of multi-object spectrographs (MOS) in astronomy will use MEMS-based programmable slit masks. Large micromirror arrays with 2048 tiltable micromirrors were fabricated using bulk and surface micro-machining, and wafer level bonding for the assembly. Micromirror size is 100μm × 200 μm and they exhibit very good surface flatness. Mirror architecture as well as a large mechanical tilt angle of 25° lead to a high contrast device, in the order of 1000:1, large enough for objects and background rejection in the MOS field of view. Finally, the micromirrors could be successfully actuated before, during and after cryogenic cooling at 162K.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90906832","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659033
Phuong-Ha Cu-Nguyen, A. Grewe, S. Sinzinger, H. Zappe, A. Seifert
A tunable hyperchromatic system for confocal imaging is presented. The system, consisting of a magnetically-actuated, hydraulically-tunable concave membrane lens in combination with a positive diffractive lens, functions as a tunable filter in the 450 - 900nm spectral range. A spectral width of 15nm is demonstrated over the entire spectral range.
{"title":"Tunable confocal hyperspectral imaging system","authors":"Phuong-Ha Cu-Nguyen, A. Grewe, S. Sinzinger, H. Zappe, A. Seifert","doi":"10.1109/OMN.2013.6659033","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659033","url":null,"abstract":"A tunable hyperchromatic system for confocal imaging is presented. The system, consisting of a magnetically-actuated, hydraulically-tunable concave membrane lens in combination with a positive diffractive lens, functions as a tunable filter in the 450 - 900nm spectral range. A spectral width of 15nm is demonstrated over the entire spectral range.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77934352","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659045
Jae-jun Kim, D. Keum, K. Jeong
This work presents a novel method of fabricating asymmetric microstructures for light extraction enhancement and light pattern modulation. Asymmetric microstructures were fabricated at wafer level by two-step photolithography, surface energy modulation, and thermal reflow. The microstructures improve light extraction efficiency by suppressing total internal reflection and modulate far-field light distribution by changing incident angle of light. Light extraction and light pattern can be changed by design of asymmetric microstructures. These structures can be utilized for display and lighting applications.
{"title":"Asymmetric microstructures for high light extraction and light pattern modulation","authors":"Jae-jun Kim, D. Keum, K. Jeong","doi":"10.1109/OMN.2013.6659045","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659045","url":null,"abstract":"This work presents a novel method of fabricating asymmetric microstructures for light extraction enhancement and light pattern modulation. Asymmetric microstructures were fabricated at wafer level by two-step photolithography, surface energy modulation, and thermal reflow. The microstructures improve light extraction efficiency by suppressing total internal reflection and modulate far-field light distribution by changing incident angle of light. Light extraction and light pattern can be changed by design of asymmetric microstructures. These structures can be utilized for display and lighting applications.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79817648","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659038
M. Nakajima, K. Kuwabara, Takako Ishihara, T. Sakata, M. Usui, N. Nemoto, E. Hashimoto, J. Yamaguchi, S. Uchiyama, Yoshito Jin
Dielectric charging of MEMS micromirrors causes tilt angle drift, which is a major reliability problem for telecom applications. In this paper, we propose a physical model of angle drift in a MEMS mirror system considering surface charge motion on dielectric oxide. Good agreement is obtained between the model calculation and experimental results, which suggest that angle drift can be predicted by the proposed model.
{"title":"A physical modeling and long-term measurement of tilting angle drift caused by dielectric surface charging in MEMS micromirrors","authors":"M. Nakajima, K. Kuwabara, Takako Ishihara, T. Sakata, M. Usui, N. Nemoto, E. Hashimoto, J. Yamaguchi, S. Uchiyama, Yoshito Jin","doi":"10.1109/OMN.2013.6659038","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659038","url":null,"abstract":"Dielectric charging of MEMS micromirrors causes tilt angle drift, which is a major reliability problem for telecom applications. In this paper, we propose a physical model of angle drift in a MEMS mirror system considering surface charge motion on dielectric oxide. Good agreement is obtained between the model calculation and experimental results, which suggest that angle drift can be predicted by the proposed model.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85072482","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659083
S. Samuelson, Huikai Xie
A waveguide structure is designed and fabricated to provide a path for propagating light from device substrate to a movable mirror plate. The device is constructed with three pairs of electrothermal actuators that enable vertical motion with ultralow lateral shift. The actuators enable actuation of the waveguide over 56μm at only 1.2V from an initial displacement of 217μm. The measured resistance of the actuator pairs is 52Ω, and the device consumes a maximum power of 75mW with all actuator pairs at peak power.
{"title":"Electrothermally actuated large displacement waveguides","authors":"S. Samuelson, Huikai Xie","doi":"10.1109/OMN.2013.6659083","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659083","url":null,"abstract":"A waveguide structure is designed and fabricated to provide a path for propagating light from device substrate to a movable mirror plate. The device is constructed with three pairs of electrothermal actuators that enable vertical motion with ultralow lateral shift. The actuators enable actuation of the waveguide over 56μm at only 1.2V from an initial displacement of 217μm. The measured resistance of the actuator pairs is 52Ω, and the device consumes a maximum power of 75mW with all actuator pairs at peak power.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86775830","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659044
D. Keum, K. Jeong
This work reports the artificial compound eye using fractal zone plate (FraZP) arrays. Spherically arranged optical elements (ommatidia) of compound eyes facilitate wide field-of-view (FOV) imaging. However, due to the lack of curved image sensors, it was difficult to integrate hemispherical shape of an artificial compound eye with commercially available flat image sensors. FraZP gives sufficient variation of focal length compared to a micro lens fabricated by reflow process. Flat image plane can be easily obtained by controlling the focal length of each FraZP so that 3-dimensional structure of the artificial compound eye is compatible to a conventional image sensor.
{"title":"Artificial compound eye with fractal zone plate arrays","authors":"D. Keum, K. Jeong","doi":"10.1109/OMN.2013.6659044","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659044","url":null,"abstract":"This work reports the artificial compound eye using fractal zone plate (FraZP) arrays. Spherically arranged optical elements (ommatidia) of compound eyes facilitate wide field-of-view (FOV) imaging. However, due to the lack of curved image sensors, it was difficult to integrate hemispherical shape of an artificial compound eye with commercially available flat image sensors. FraZP gives sufficient variation of focal length compared to a micro lens fabricated by reflow process. Flat image plane can be easily obtained by controlling the focal length of each FraZP so that 3-dimensional structure of the artificial compound eye is compatible to a conventional image sensor.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88125277","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659111
Zhengli Han, K. Kohno, T. Haatainen, Tapio Makela, H. Fujita, K. Hirakawa, H. Toshiyoshi
We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.
{"title":"Electrostatic MEMS tunable split-ring resonators for THz filter applications","authors":"Zhengli Han, K. Kohno, T. Haatainen, Tapio Makela, H. Fujita, K. Hirakawa, H. Toshiyoshi","doi":"10.1109/OMN.2013.6659111","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659111","url":null,"abstract":"We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85760886","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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