{"title":"Fabrication and evaluation of CVD diamond resonators","authors":"Y. Mochimaru, M. Toda, T. Ono","doi":"10.1109/NANO.2016.7751555","DOIUrl":null,"url":null,"abstract":"In this paper, thin film diamond resonators on Si wafer for high sensitivity force sensing have been developed. Patterned diamond structures have been formed on Ir/YSZ/Si substrate. The completed diamond resonator of cantilever shows a resonance frequency of 51.0 kHz with a quality factor of 14911. The both clamped resonator shows the force sensitivity of 3.36×10-13 N/Hz0.5 at 229.3 kHz with 23500 of Q factor. While the crystallites and surface roughness are required to be improved, the patterned diamond resonator can be used as a high sensitive physicochemical sensing tool.","PeriodicalId":6646,"journal":{"name":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","volume":"70 1","pages":"676-677"},"PeriodicalIF":0.0000,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2016.7751555","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, thin film diamond resonators on Si wafer for high sensitivity force sensing have been developed. Patterned diamond structures have been formed on Ir/YSZ/Si substrate. The completed diamond resonator of cantilever shows a resonance frequency of 51.0 kHz with a quality factor of 14911. The both clamped resonator shows the force sensitivity of 3.36×10-13 N/Hz0.5 at 229.3 kHz with 23500 of Q factor. While the crystallites and surface roughness are required to be improved, the patterned diamond resonator can be used as a high sensitive physicochemical sensing tool.
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