{"title":"High sensitive silicon optical index sensor based on Ring-assisted Mach-Zehnder interferometer","authors":"Tian-ling Zhang, Bo Li, C. Ho, Chengkuo Lee","doi":"10.1109/OMN.2013.6659093","DOIUrl":null,"url":null,"abstract":"This paper demonstrated the design and fabrication of Ring-assisted Mach-Zehnder interferometer (RA-MZI) based optical sensor. The measurement result shows a free spectrum range (FSR) of 5 nm and a highest Q-factor of 2000. Finite difference time domain (FDTD) simulation result shows a sensitivity of 137.5 nm/RIU for sensing ambient refractive index (RI) change.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"40 1","pages":"129-130"},"PeriodicalIF":0.0000,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2013.6659093","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper demonstrated the design and fabrication of Ring-assisted Mach-Zehnder interferometer (RA-MZI) based optical sensor. The measurement result shows a free spectrum range (FSR) of 5 nm and a highest Q-factor of 2000. Finite difference time domain (FDTD) simulation result shows a sensitivity of 137.5 nm/RIU for sensing ambient refractive index (RI) change.
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