Umidjon Nurmetov, Tobias Fritz, Ernst Müllner, Christopher M. Dougherty, F. Kreupl, R. Brederlow
{"title":"A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution","authors":"Umidjon Nurmetov, Tobias Fritz, Ernst Müllner, Christopher M. Dougherty, F. Kreupl, R. Brederlow","doi":"10.23919/VLSIC.2019.8778132","DOIUrl":null,"url":null,"abstract":"An integrated 11-bit 2-D CMOS stress sensor is presented with 66dB of dynamic range, measuring -100 to 360MPa, and < 1LSB error over temperature from 5°C to 90°C. N-Well-based primary elements enable accurate sensing of stress magnitude and angle, and allow repeatable error compensation.","PeriodicalId":6707,"journal":{"name":"2019 Symposium on VLSI Circuits","volume":"117 1","pages":"C64-C65"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 Symposium on VLSI Circuits","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/VLSIC.2019.8778132","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
An integrated 11-bit 2-D CMOS stress sensor is presented with 66dB of dynamic range, measuring -100 to 360MPa, and < 1LSB error over temperature from 5°C to 90°C. N-Well-based primary elements enable accurate sensing of stress magnitude and angle, and allow repeatable error compensation.
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