{"title":"Resonant cavity coupled infrared detectors with high detectivity operating at room temperature","authors":"A. Gawarikar, R. Shea, J. Talghader","doi":"10.1109/OMN.2013.6659057","DOIUrl":null,"url":null,"abstract":"A spectrally selective uncooled long wave infrared detector with peak detectivity between 3×10<sup>9</sup> cm Hz<sup>1/2</sup>/W and 4.4×10<sup>9</sup> cm Hz<sup>1/2</sup>/W is reported. The detector is fabricated using silicon microfabrication techniques and integrates a thermoelectric readout with a resonant optical cavity to achieve wavelength selective absorption.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2013.6659057","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A spectrally selective uncooled long wave infrared detector with peak detectivity between 3×109 cm Hz1/2/W and 4.4×109 cm Hz1/2/W is reported. The detector is fabricated using silicon microfabrication techniques and integrates a thermoelectric readout with a resonant optical cavity to achieve wavelength selective absorption.
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