Synthesis of Conductive Sol-Gel ZnO Films and Development of ZnO Printed Electronics

Abstract

ZnO thin films are synthesized and studied to understand the functionality of solu - tion-processed semiconductor devices. A simple sol-gel technique is used to fabricate transparent conductive oxides (TCOs) and ultraviolet (UV) photodetectors from ZnO precursors via spin coating, inkjet printing (IJP), and aerosol jet printing (AJP). A variety of flexible and transparent substrates was selected based on the deposition and sintering conditions and the device application. Doping of ZnO films with Al 3+ , In 3+ , and Ga 3+ was introduced in precursor solutions before deposition processes. Post-deposition process - ing was carried out in air, H 2 , and Zn environments to optimize thin film properties. Optical, structural, and electronic data analyses reveal the significant effects that deposi - tion method, substrates, dopants, and processing conditions have on the optical trans -mission, crystallinity, grain size, and electrical conductivity.