G. Laghi, A. Longoni, P. Minotti, A. Tocchio, G. Langfelder
{"title":"100 µA, 320 nT/vHz, 3-AXIS Lorentz force MEMS magnetometer","authors":"G. Laghi, A. Longoni, P. Minotti, A. Tocchio, G. Langfelder","doi":"10.1109/TRANSDUCERS.2015.7181045","DOIUrl":null,"url":null,"abstract":"The work presents a module for earth magnetic field measurements based on four microelectromechanical devices: one out-of-plane and two in-plane differential Lorentz-force magnetometers, and a Tang resonator. The latter is used to provide the reference frequency in off-resonance operation, a way that enables the magnetometers to share the same Lorentz current, giving an intrinsic 3-fold consumption decrease. At the same time, using multiple-loop design, a 5-fold larger sensitivity and a 4-fold better resolution are obtained with respect to previous implementations that used the same process. The system operating bandwidth is electronically selectable up to 50 Hz.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2015.7181045","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
The work presents a module for earth magnetic field measurements based on four microelectromechanical devices: one out-of-plane and two in-plane differential Lorentz-force magnetometers, and a Tang resonator. The latter is used to provide the reference frequency in off-resonance operation, a way that enables the magnetometers to share the same Lorentz current, giving an intrinsic 3-fold consumption decrease. At the same time, using multiple-loop design, a 5-fold larger sensitivity and a 4-fold better resolution are obtained with respect to previous implementations that used the same process. The system operating bandwidth is electronically selectable up to 50 Hz.