{"title":"The ZnO-based TCO with low resistivity and high carrier concentration prepared by femtosecond laser","authors":"Yaoyao Liu, Qiang Wu, J. Yao, Jingjun Xu","doi":"10.1364/cleo_at.2022.jw3b.174","DOIUrl":null,"url":null,"abstract":"ZnO-based TCO with a resistivity of 1.93×10-4 Ω cm was achieved by femtosecond laser processing without elements doping. Besides, the carrier density increased by five orders of magnitude compared to the pristine one.","PeriodicalId":72688,"journal":{"name":"Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/cleo_at.2022.jw3b.174","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
ZnO-based TCO with a resistivity of 1.93×10-4 Ω cm was achieved by femtosecond laser processing without elements doping. Besides, the carrier density increased by five orders of magnitude compared to the pristine one.
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