{"title":"Nonlinearity-assisted frequency stabilization for nanowire array membrane oscillator","authors":"Yuerui Lu, A. Lal","doi":"10.1109/MEMSYS.2013.6474326","DOIUrl":null,"url":null,"abstract":"The sensitivity of a micro/nano-scale mechanical mass sensor is limited by its frequency stabilities, which are affected by various frequency noises. Typically, device nonlinearity is intentionally avoided, because higher amplitude fluctuations in the nonlinear region could be translated into frequency variability. Here, we successfully used damping nonlinearity bifurcation to stabilize a mechanical membrane oscillator frequency to 0.04 ppm, a reduction by two orders of magnitude over that from linear motion. This method presents a general mechanism for oscillation frequency stabilization. We recently presented a DNA mass sensor with femto-molar sensitivity - coupled with the result in this paper, the sensitivity of the mass sensor could be improved by a factor of two orders of magnitude.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2013.6474326","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

Abstract

The sensitivity of a micro/nano-scale mechanical mass sensor is limited by its frequency stabilities, which are affected by various frequency noises. Typically, device nonlinearity is intentionally avoided, because higher amplitude fluctuations in the nonlinear region could be translated into frequency variability. Here, we successfully used damping nonlinearity bifurcation to stabilize a mechanical membrane oscillator frequency to 0.04 ppm, a reduction by two orders of magnitude over that from linear motion. This method presents a general mechanism for oscillation frequency stabilization. We recently presented a DNA mass sensor with femto-molar sensitivity - coupled with the result in this paper, the sensitivity of the mass sensor could be improved by a factor of two orders of magnitude.
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纳米线阵列膜振荡器的非线性辅助频率稳定
微纳机械质量传感器的灵敏度受到频率稳定性的限制,而频率稳定性又受各种频率噪声的影响。通常,故意避免器件非线性,因为非线性区域的较高幅度波动可能转化为频率变化。在这里,我们成功地使用阻尼非线性分岔将机械膜振荡器的频率稳定在0.04 ppm,比线性运动降低了两个数量级。该方法给出了稳定振荡频率的一般机理。我们最近提出了一种具有飞摩尔灵敏度的DNA质量传感器,与本文的结果相结合,质量传感器的灵敏度可以提高两个数量级。
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