2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献
Pub Date : 2013-10-20DOI: 10.1109/MEMSYS.2013.6474277
David Castro, P. Ingram, R. Kodzius, D. Conchouso, E. Yoon, I. Foulds
This paper reports on solid UV cross-linked Poly(ethylene)-glycol-diacrylate (PEGDA) as a material for microfluidic devices for biological applications. We have evaluated biocompatibility of PEGDA through two separate means: 1) by examining cell viability and attachment on cross-linked PEGDA surfaces for cell culture applications, and 2) by determining if cross-linked PEGDA inhibits the polymerase chain reaction (PCR) processes for on-chip PCR. Through these studies a correlation has been found between degree of curing and cell viability, attachment, as well as on PCR outcome.
{"title":"Characterization of solid UV cross-linked PEGDA for biological applications","authors":"David Castro, P. Ingram, R. Kodzius, D. Conchouso, E. Yoon, I. Foulds","doi":"10.1109/MEMSYS.2013.6474277","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474277","url":null,"abstract":"This paper reports on solid UV cross-linked Poly(ethylene)-glycol-diacrylate (PEGDA) as a material for microfluidic devices for biological applications. We have evaluated biocompatibility of PEGDA through two separate means: 1) by examining cell viability and attachment on cross-linked PEGDA surfaces for cell culture applications, and 2) by determining if cross-linked PEGDA inhibits the polymerase chain reaction (PCR) processes for on-chip PCR. Through these studies a correlation has been found between degree of curing and cell viability, attachment, as well as on PCR outcome.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-10-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81861477","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-02DOI: 10.1109/MEMSYS.2013.6474214
H. Kuriki, Y. Yamanishi, S. Sakuma, S. Akagi, F. Arai
For the present study, simultaneous ablation and injection was successfully operated by using electrically-induced micro-bubble knife for biomedical applications. The novelty of the present techniques are (1) dispensing of micro-bubble can penetrate and make an ablation of a cytomembrane and (2) the reagent was successfully introduced to the interface of the bubble surface. This technique has advantages over the conventional injection technologies such as electroporation or ultrasound operation in terms of localization of injection and ability of transportation.
{"title":"Simultaneous ablation and injection by electrically-induced mono-dispersed bubble knife for biomedical applications","authors":"H. Kuriki, Y. Yamanishi, S. Sakuma, S. Akagi, F. Arai","doi":"10.1109/MEMSYS.2013.6474214","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474214","url":null,"abstract":"For the present study, simultaneous ablation and injection was successfully operated by using electrically-induced micro-bubble knife for biomedical applications. The novelty of the present techniques are (1) dispensing of micro-bubble can penetrate and make an ablation of a cytomembrane and (2) the reagent was successfully introduced to the interface of the bubble surface. This technique has advantages over the conventional injection technologies such as electroporation or ultrasound operation in terms of localization of injection and ability of transportation.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89862825","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-04-02DOI: 10.1109/MEMSYS.2013.6474217
K. Okita, M. Kato‐Negishi, H. Onoe, S. Takeuchi
This paper describes a centimeter-sized flexible multi-electrode array (MEA) integrated with a neuronal spheroid (neurospheroid) array. The MEA has a number of neurospheroids and can be applied to extensively curved surfaces (e.g., brain). We demonstrated that MEA successfully activated neurons within a neurospheroid on the microelectrode array. In addition, the MEA was used to activate 2D culture of cortical cells through the neurospheroids. These results mark an important step toward achieving minimally-invasive cortical microstimulation via neurospheroid-based stimulating systems.
{"title":"Neurospheroid array on a flexible substrate for cortical microstimulation","authors":"K. Okita, M. Kato‐Negishi, H. Onoe, S. Takeuchi","doi":"10.1109/MEMSYS.2013.6474217","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474217","url":null,"abstract":"This paper describes a centimeter-sized flexible multi-electrode array (MEA) integrated with a neuronal spheroid (neurospheroid) array. The MEA has a number of neurospheroids and can be applied to extensively curved surfaces (e.g., brain). We demonstrated that MEA successfully activated neurons within a neurospheroid on the microelectrode array. In addition, the MEA was used to activate 2D culture of cortical cells through the neurospheroids. These results mark an important step toward achieving minimally-invasive cortical microstimulation via neurospheroid-based stimulating systems.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80726372","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474343
M. Ren, H. Lai, L. Isai, D. Kwong, A. Liu
This paper presents an optical force driven nano-machined actuator and the “pull-back” effect of a free-standing arc in an opto-mechanical ring resonator system. This nano-actuator obtains a maximal central displacement of 43.1 nm, with an actuation resolution of 0.28 nm, via tuning the wavelength of the control light at a fixed optical power of 2.8 mW. The “pull-back” effect occurs at the maximal displacement position, which is studied by the combination of experiments and simulation. Potential applications include bio-nano-motor, all-optical switches and opto-mechanical memories.
{"title":"Nano actuator and “pull-back” nonlinearity","authors":"M. Ren, H. Lai, L. Isai, D. Kwong, A. Liu","doi":"10.1109/MEMSYS.2013.6474343","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474343","url":null,"abstract":"This paper presents an optical force driven nano-machined actuator and the “pull-back” effect of a free-standing arc in an opto-mechanical ring resonator system. This nano-actuator obtains a maximal central displacement of 43.1 nm, with an actuation resolution of 0.28 nm, via tuning the wavelength of the control light at a fixed optical power of 2.8 mW. The “pull-back” effect occurs at the maximal displacement position, which is studied by the combination of experiments and simulation. Potential applications include bio-nano-motor, all-optical switches and opto-mechanical memories.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73650107","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474435
J. Kuo, B. J. Kim, S. Hara, C. D. Lee, L. Yu, C. Gutierrez, T. Hoang, V. Pikov, E. Meng
Parylene C neural probes with a 3D sheath structure are introduced as a novel interface for long-term intracortical neural recording. 3D sheath structures were assembled from surface micromachined Parylene microchannels by thermoforming the thermoplastic around a solid microwire mold. Multiple Pt electrodes lined the interior and exterior of the sheath. Electrochemical characterization of the electrodes confirmed impedance values (50-250 KΩ at 1 kHz) suitable for neural recordings. A novel insertion approach was developed that temporarily stiffens the neural probes for surgical implantation and optimized in agarose brain tissue model. Sheath probes implanted into rat cortex recorded neural signals for four weeks. To achieve long-term, reliable recordings, the sheath structures will be coated with eluting neurotrophic factors to promote and attract neural ingrowth towards electrode sites.
{"title":"3D Parylene sheath probes for reliable, long-term neuroprosthetic recordings","authors":"J. Kuo, B. J. Kim, S. Hara, C. D. Lee, L. Yu, C. Gutierrez, T. Hoang, V. Pikov, E. Meng","doi":"10.1109/MEMSYS.2013.6474435","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474435","url":null,"abstract":"Parylene C neural probes with a 3D sheath structure are introduced as a novel interface for long-term intracortical neural recording. 3D sheath structures were assembled from surface micromachined Parylene microchannels by thermoforming the thermoplastic around a solid microwire mold. Multiple Pt electrodes lined the interior and exterior of the sheath. Electrochemical characterization of the electrodes confirmed impedance values (50-250 KΩ at 1 kHz) suitable for neural recordings. A novel insertion approach was developed that temporarily stiffens the neural probes for surgical implantation and optimized in agarose brain tissue model. Sheath probes implanted into rat cortex recorded neural signals for four weeks. To achieve long-term, reliable recordings, the sheath structures will be coated with eluting neurotrophic factors to promote and attract neural ingrowth towards electrode sites.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74311620","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474429
E. Vereshchagina, K. Bourke, L. Meehan, C. Dixit, D. M. Glade, J. Ducrée
In this work we demonstrate novel, low cost, hybrid, polymer-paper disc devices for carrying out biomedical tests in resource-poor settings. The system combines the advantages of two major effects - sample transport in a paper membrane by capillary force and active rotational flow control by centrifugal force. Capabilities of the paper disc system include but are not limited to spatiotemporal flow control, pre-storage of reagents and integrated colorimetric indicators all suitable for performing multiple-step bioassays.
{"title":"Multi-material paper-disc devices for low cost biomedical diagnostics","authors":"E. Vereshchagina, K. Bourke, L. Meehan, C. Dixit, D. M. Glade, J. Ducrée","doi":"10.1109/MEMSYS.2013.6474429","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474429","url":null,"abstract":"In this work we demonstrate novel, low cost, hybrid, polymer-paper disc devices for carrying out biomedical tests in resource-poor settings. The system combines the advantages of two major effects - sample transport in a paper membrane by capillary force and active rotational flow control by centrifugal force. Capabilities of the paper disc system include but are not limited to spatiotemporal flow control, pre-storage of reagents and integrated colorimetric indicators all suitable for performing multiple-step bioassays.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75448282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474219
Rui Yang, Tina He, C. Marcoux, P. Andreucci, L. Duraffourg, P. Feng
This digest paper reports experimental demonstration of a new type of nanoelectromechanical device, combining contact-mode nanomechanical switching with sensitive integrated strain gauges in suspended thin (sub-100nm) silicon nanowires (SiNWs). By measuring and modeling the interesting coupling effects between mechanical strain and electrical transport in highly piezoresistive (PZR) thin SiNWs at room temperature, we demonstrate that, in both doubly-clamped SiNWs and mechanically `cross' coupled cantilever-SiNW structures, contact-mode and tunneling switching with multiple repeatable cycles can be also simultaneously monitored and read out in the SiNW PZR transducers naturally embedded in the devices. Given the strong piezoresistive effects in thin SiNWs, this type of devices offer a new approach for monitoring contact-mode operations, and may prove valuable when the nanoscale contacts are not highly conductive, or degrading over time.
{"title":"Silicon nanowire and cantilever electromechanical switches with integrated piezoresistive transducers","authors":"Rui Yang, Tina He, C. Marcoux, P. Andreucci, L. Duraffourg, P. Feng","doi":"10.1109/MEMSYS.2013.6474219","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474219","url":null,"abstract":"This digest paper reports experimental demonstration of a new type of nanoelectromechanical device, combining contact-mode nanomechanical switching with sensitive integrated strain gauges in suspended thin (sub-100nm) silicon nanowires (SiNWs). By measuring and modeling the interesting coupling effects between mechanical strain and electrical transport in highly piezoresistive (PZR) thin SiNWs at room temperature, we demonstrate that, in both doubly-clamped SiNWs and mechanically `cross' coupled cantilever-SiNW structures, contact-mode and tunneling switching with multiple repeatable cycles can be also simultaneously monitored and read out in the SiNW PZR transducers naturally embedded in the devices. Given the strong piezoresistive effects in thin SiNWs, this type of devices offer a new approach for monitoring contact-mode operations, and may prove valuable when the nanoscale contacts are not highly conductive, or degrading over time.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72594800","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474238
M. Tsuwaki, J. Mizuno, T. Kasahara, T. Edura, S. Matsunami, J. Oshima, C. Adach, S. Shoji
A simple and high-throughput fabrication of large-area and multilayer polymer film structures was developed and applied for microfluidic organic light emitting diodes (OLED). We employed following three distinguished technologies, a) screen-printing technique for transparent electrodes, b) novel belt-transfer exposure technology for SU-8 microchannels, and c) heterogeneous low temperature bonding technology using self-assembly monolayer. A Liquid organic semiconductor as a liquid emitter was injected to each microchannel and photoluminescence and electroluminescence were obtained not only in a straight state, but also in a bending state. This large-area flexible microfluidic structure for OLED is applicable to nondisposable posters or displays which can be adopted around the curved surfaces of the various structures.
{"title":"Simple and high-throughput fabrication of large-area and multilayer flexible polymer film structures for microfluidic organic light emitting diode","authors":"M. Tsuwaki, J. Mizuno, T. Kasahara, T. Edura, S. Matsunami, J. Oshima, C. Adach, S. Shoji","doi":"10.1109/MEMSYS.2013.6474238","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474238","url":null,"abstract":"A simple and high-throughput fabrication of large-area and multilayer polymer film structures was developed and applied for microfluidic organic light emitting diodes (OLED). We employed following three distinguished technologies, a) screen-printing technique for transparent electrodes, b) novel belt-transfer exposure technology for SU-8 microchannels, and c) heterogeneous low temperature bonding technology using self-assembly monolayer. A Liquid organic semiconductor as a liquid emitter was injected to each microchannel and photoluminescence and electroluminescence were obtained not only in a straight state, but also in a bending state. This large-area flexible microfluidic structure for OLED is applicable to nondisposable posters or displays which can be adopted around the curved surfaces of the various structures.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76468516","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474293
M. Shavezipur, W. S. Lee, K. Harrison, J. Provine, S. Mitra, H. Wong, R. Howe
Laterally actuated nanoelectromechanical relays with compliant source-drain contacts are presented. The relay sidewalls are coated with a 30 nm-thick conductive layer of titanium nitride (TiN) deposited using atomic layer deposition (ALD). By hollowing the tip of the relay, a flexible sidewall is formed from the thin TiN that results in a larger contact area and therefore improves the contact properties of the relay. This modification improves the on-state resistance (RON) and also provides better stability over a larger number of switching cycles compared to a rigid contact. The results of life-time tests show that the contact resistance increases with the number of switching cycles possibly due to degradation of the contact material. However, flexible contacts show improved contact resistance stability under cyclic contact.
{"title":"Laterally actuated nanoelectromechanical relays with compliant, low resistance contact","authors":"M. Shavezipur, W. S. Lee, K. Harrison, J. Provine, S. Mitra, H. Wong, R. Howe","doi":"10.1109/MEMSYS.2013.6474293","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474293","url":null,"abstract":"Laterally actuated nanoelectromechanical relays with compliant source-drain contacts are presented. The relay sidewalls are coated with a 30 nm-thick conductive layer of titanium nitride (TiN) deposited using atomic layer deposition (ALD). By hollowing the tip of the relay, a flexible sidewall is formed from the thin TiN that results in a larger contact area and therefore improves the contact properties of the relay. This modification improves the on-state resistance (RON) and also provides better stability over a larger number of switching cycles compared to a rigid contact. The results of life-time tests show that the contact resistance increases with the number of switching cycles possibly due to degradation of the contact material. However, flexible contacts show improved contact resistance stability under cyclic contact.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80142732","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474233
Y. Zhang, H. Keum, S. Kim
Micro-masonry is a microassembly technique that is based on transfer printing and direct bonding. This paper presents the assembly of MEMS mechanical sensors and actuators based on this micro-masonry technique. Microfabrication processes for retrievable MEMS components (e.g., combs, flexure beams, and metal pads) are developed. As manipulation tools, elastomeric microtipped stamps with switchable dry adhesion are also designed and fabricated to pick up and place those components. After the assembly, the components are permanently bonded together via rapid thermal annealing. The sensing and actuating capabilities of the assembled MEMS devices are characterized.
{"title":"Microassembly of MEMS actuators and sensors via micro-masonry","authors":"Y. Zhang, H. Keum, S. Kim","doi":"10.1109/MEMSYS.2013.6474233","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474233","url":null,"abstract":"Micro-masonry is a microassembly technique that is based on transfer printing and direct bonding. This paper presents the assembly of MEMS mechanical sensors and actuators based on this micro-masonry technique. Microfabrication processes for retrievable MEMS components (e.g., combs, flexure beams, and metal pads) are developed. As manipulation tools, elastomeric microtipped stamps with switchable dry adhesion are also designed and fabricated to pick up and place those components. After the assembly, the components are permanently bonded together via rapid thermal annealing. The sensing and actuating capabilities of the assembled MEMS devices are characterized.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79423990","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)
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