A graphene FET gas sensor gated by ionic liquid

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474408

A. Inaba, G. Yoo, Y. Takei, Kiyoshi Matsumoto, I. Shimoyama

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引用次数: 22

Abstract

We report a gas sensor based on a field-effect transistor (FET) with a graphene channel and ionic liquid (IL) gate. Graphene is supremely sensitive to its surroundings. Owing to the ~1-nm-thick electric double layer, ILs enable low-voltage operation of the FET. In addition, their solubility selectivity for different gases are controllable. Therefore, the proposed sensor selectively detects low concentration gases at low gate voltage. We fabricated the IL-gate FET using graphene grown by chemical vapor deposition. The current-voltage characteristic of the graphene-FET changed in proportion to logarithm of gas concentration. We demonstrated that our device was able to detect at least 30 ppm of ammonia (NH3) and 4000 ppm of carbon dioxide (CO2) at gate voltage below 1 V. The difference between the current-voltage response to NH3 and CO2 indicates the potential for selective gas measurement.

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离子液体门控的石墨烯FET气体传感器

我们报道了一种基于场效应晶体管(FET)的气体传感器，该传感器具有石墨烯通道和离子液体(IL)栅极。石墨烯对周围环境极为敏感。由于具有~ 1nm厚的双电层，因此可以实现FET的低压工作。此外，它们对不同气体的溶解度选择性是可控的。因此，该传感器可以在低栅极电压下选择性地检测低浓度气体。我们利用化学气相沉积法生长的石墨烯制备了il栅极场效应管。石墨烯-场效应管的电流-电压特性与气体浓度的对数成正比。我们证明了我们的设备能够在低于1 V的栅极电压下检测至少30 ppm的氨(NH3)和4000 ppm的二氧化碳(CO2)。对NH3和CO2的电流-电压响应之间的差异表明了选择性气体测量的潜力。

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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