Alteration by repeated electrostatic MEMS actuation of the thermoluminescence of thin films

Abstract

The thermoluminescence characteristics of a thin film of terbium-doped yttrium oxide change upon repeated stress application through electrostatic actuation. A maximum 42% decrease in the intensity of two thermoluminescent peaks is seen when voltage is applied in 5V increments to 25V, translating to 0.15 μm of center deflection. While the overall intensity decreases, the higher temperature peak - corresponding to deeper traps - is affected more than the lower temperature one. Two possible physical explanations for the behavior are mechanical stress and dielectric charging.