ダイヤモンド・ライク・カーボン（DLC）膜とその応用展開;ダイヤモンド・ライク・カーボン（DLC）膜とその応用展開;Characteristics and Applications of Diamond Like Carbon (DLC) Films

Abstract

Diamond Like Carbon (DLC) ˆlms have several unique characteristics, high-hardness, wear resistances, low friction, and good chemical stability. Thus, their applications are widely spread, for example, automotive and mechanical sliding parts, cutting tools, and molding dies. In this paper, we describe their deposition processes, ˆlm structures, characteristics and mechanical properties, and their applications. Finally, we mention some recent developments and possibilities.