27, 2017, Accepted June 20, 2017 ) A system for time-resolved photoemission electron microscopy ( TR PEEM ) conducted with femtosecond laser pulses has been de-veloped to explore the photogenerated electron dynamics on semiconductor surfaces. Attained space and time resolutions were 100 nm and 100 fs, respectively. The present manuscript introduces the TR PEEM system, and also reports the observation of diŠerent photogenerated electron lifetimes in diŠerent nanoscale structural defects randomly distributed on a semiconductor surface. The results were explained based on Schockley-Read-Hall ( SRH ) model relating the carrier recombination time and the defect state density. The
{"title":"半導体表面における光励起キャリアダイナミクスの時間・空間分解計測;半導体表面における光励起キャリアダイナミクスの時間・空間分解計測;Spatio-temporal Observation of Photogenerated Carrier Dynamics on a Semiconductor Surface","authors":"K. Fukumoto","doi":"10.3131/JVSJ2.60.388","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.388","url":null,"abstract":"27, 2017, Accepted June 20, 2017 ) A system for time-resolved photoemission electron microscopy ( TR PEEM ) conducted with femtosecond laser pulses has been de-veloped to explore the photogenerated electron dynamics on semiconductor surfaces. Attained space and time resolutions were 100 nm and 100 fs, respectively. The present manuscript introduces the TR PEEM system, and also reports the observation of diŠerent photogenerated electron lifetimes in diŠerent nanoscale structural defects randomly distributed on a semiconductor surface. The results were explained based on Schockley-Read-Hall ( SRH ) model relating the carrier recombination time and the defect state density. The","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"23 1","pages":"388-391"},"PeriodicalIF":0.0,"publicationDate":"2017-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86805158","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Graphene: a monolayer sheet of graphite shows many attractive properties, which are expected to be applied to various devices. Development of a high throughput method has been required to realize the applications. Chemical exfoliation via graphene oxide (GO) has been considered one of the promising methods. However, the graphene reduced from GO showed poor crystallinity and mobility than that of mechanically exfoliated graphene. Many reduction methods have been investigated to obtain high mobility graphene from GO lately. In this review, we introduce a novel reduction method which we have developed to convert GO to graphene by explaining their advantages and some ‰aws to be solved.
{"title":"High Degree Reduction of Graphene Oxide toward a High Carrier Mobility","authors":"Seiji Obata, Minoru Sato, K. Saiki","doi":"10.3131/jvsj2.60.300","DOIUrl":"https://doi.org/10.3131/jvsj2.60.300","url":null,"abstract":"Graphene: a monolayer sheet of graphite shows many attractive properties, which are expected to be applied to various devices. Development of a high throughput method has been required to realize the applications. Chemical exfoliation via graphene oxide (GO) has been considered one of the promising methods. However, the graphene reduced from GO showed poor crystallinity and mobility than that of mechanically exfoliated graphene. Many reduction methods have been investigated to obtain high mobility graphene from GO lately. In this review, we introduce a novel reduction method which we have developed to convert GO to graphene by explaining their advantages and some ‰aws to be solved.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"51 1","pages":"300-306"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88579526","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Tetsuya Yamamoto, J. Nomoto, H. Kitami, T. Sakemi, H. Makino, Keisuke L. I. Kobayashi, Y. Aoki, S. Kishimoto
Design of Advanced Functional ZnO Conductive Thin Films with Arc Plasma Tetsuya YAMAMOTO1, Junichi NOMOTO1, Hisashi KITAMI1,2, Toshiyuki SAKEMI2, Hisao MAKINO1, Keisuke KOBAYASHI1, Yasushi AOKI2 and Seiichi KISHIMOTO3 1Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kami-shi, Kochi 7828502, Japan 2Technology Research Center, Sumitomo Heavy Industries Ltd., 19 Natsushima-cho, Yokosuka-shi, Kanagawa 2378555, Japan 3Department of Mechanical Engineering, Kochi National College of Technology, 2001 Otsu Monobe, Nankoku-shi, Kochi 7838508, Japan
{"title":"Design of Advanced Functional ZnO Conductive Thin Films with Arc Plasma","authors":"Tetsuya Yamamoto, J. Nomoto, H. Kitami, T. Sakemi, H. Makino, Keisuke L. I. Kobayashi, Y. Aoki, S. Kishimoto","doi":"10.3131/JVSJ2.60.292","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.292","url":null,"abstract":"Design of Advanced Functional ZnO Conductive Thin Films with Arc Plasma Tetsuya YAMAMOTO1, Junichi NOMOTO1, Hisashi KITAMI1,2, Toshiyuki SAKEMI2, Hisao MAKINO1, Keisuke KOBAYASHI1, Yasushi AOKI2 and Seiichi KISHIMOTO3 1Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kami-shi, Kochi 7828502, Japan 2Technology Research Center, Sumitomo Heavy Industries Ltd., 19 Natsushima-cho, Yokosuka-shi, Kanagawa 2378555, Japan 3Department of Mechanical Engineering, Kochi National College of Technology, 2001 Otsu Monobe, Nankoku-shi, Kochi 7838508, Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"49 1","pages":"292-299"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86794807","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Infrared spectroscopy combined with the matrix isolation method, where samples are trapped by a cold and inert-molecular solid, has been used for the investigations of small water clusters. After the descriptions of the stable structures and vibrations of the clusters, the author explains experimental techniques of the matrix isolation and demonstrates recent works on the clusters isolated in the solids of rare gases, para-hydrogen, and methane as well as the hydrogen adsorption layer on a vapor deposited NaCl ˆlm. The relation between the frequency shift of the hydrogen-bonded OH stretch and the matrix critical-temperature is also shown.
{"title":"Infrared Absorption Spectroscopy of Water Clusters Isolated in Cryomatrices","authors":"K. Yamakawa","doi":"10.3131/JVSJ2.60.256","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.256","url":null,"abstract":"Infrared spectroscopy combined with the matrix isolation method, where samples are trapped by a cold and inert-molecular solid, has been used for the investigations of small water clusters. After the descriptions of the stable structures and vibrations of the clusters, the author explains experimental techniques of the matrix isolation and demonstrates recent works on the clusters isolated in the solids of rare gases, para-hydrogen, and methane as well as the hydrogen adsorption layer on a vapor deposited NaCl ˆlm. The relation between the frequency shift of the hydrogen-bonded OH stretch and the matrix critical-temperature is also shown.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"1 1","pages":"256-263"},"PeriodicalIF":0.0,"publicationDate":"2017-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87867235","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ellipsometry monitoring was carried out in-situ for the analyses of substrate surface in the ˆrst stages of graphene growth in magnetron plasma-enhanced chemical vapor deposition. By the comparison of the experimentally obtained trajectory of ellipsometric parameters on the CD coordinate plane to that of the calculated ones, it has been found that graphene tends to grow parallel to substrate surface under the pressure of 10 Pa while perpendicularly under that of 200 Pa.
{"title":"プラズマ化学気相堆積におけるグラフェン成長過程の偏光解析モニタリング;プラズマ化学気相堆積におけるグラフェン成長過程の偏光解析モニタリング;Ellipsometric Monitoring of First Stages of Graphene Growth in Plasma-Enhanced Chemical Vapor Deposition","authors":"Yasuaki Hayashi, Satoshi Ishidoshiro, Shinya Yamada, Yuma Kawamura","doi":"10.3131/JVSJ2.60.135","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.135","url":null,"abstract":"Ellipsometry monitoring was carried out in-situ for the analyses of substrate surface in the ˆrst stages of graphene growth in magnetron plasma-enhanced chemical vapor deposition. By the comparison of the experimentally obtained trajectory of ellipsometric parameters on the CD coordinate plane to that of the calculated ones, it has been found that graphene tends to grow parallel to substrate surface under the pressure of 10 Pa while perpendicularly under that of 200 Pa.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"7 1","pages":"135-138"},"PeriodicalIF":0.0,"publicationDate":"2017-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90441180","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Characteristics of Crystal/Cold Cathode Wide Range Vacuum Gauge","authors":"N. Ohsako, Masahide Kuroiwa","doi":"10.3131/JVSJ2.60.193","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.193","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"10 1","pages":"193-195"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76398266","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Characteristic of the methane-hydrogen reforming is studied on the plasma reforming eŠects by the electrode structure and the additional magnetic ˆeld using the dielectric barrier discharge plasma actuator (DBDPA). The hydrogen production rate was improved by using the multiple electrode structure of DBDPA that achieved high rate of 10.6 as compared with 1.1 on single structure. Moreover, it was found that the DBD plasma conˆnement was improved by the eŠect of ‰uid control around DBDPA resulting from the addition of the magnetic ˆeld and the hydrogen product rate could increase to 13.4 by using the cusp ˆeld conˆguration.
{"title":"大気圧プラズマアクチュエータの流体制御によるメタン-水素改質の特性;大気圧プラズマアクチュエータの流体制御によるメタン-水素改質の特性;Characteristic of the Methane-hydrogen Reforming by the Fluid Control Using DBD Plasma Actuator","authors":"S. Yamanaka, Masako Shindo, Akiyoshi Nagata","doi":"10.3131/JVSJ2.60.334","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.334","url":null,"abstract":"Characteristic of the methane-hydrogen reforming is studied on the plasma reforming eŠects by the electrode structure and the additional magnetic ˆeld using the dielectric barrier discharge plasma actuator (DBDPA). The hydrogen production rate was improved by using the multiple electrode structure of DBDPA that achieved high rate of 10.6 as compared with 1.1 on single structure. Moreover, it was found that the DBD plasma conˆnement was improved by the eŠect of ‰uid control around DBDPA resulting from the addition of the magnetic ˆeld and the hydrogen product rate could increase to 13.4 by using the cusp ˆeld conˆguration.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"8 1","pages":"334-337"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79231903","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Development of Pulse Power Supplies as High Power Impulse Magnetron Sputtering (HiPIMS) Equipment Components for Medical Diamond Like Carbon (DLC) Film Fabrication Processes","authors":"Masahide Kuroiwa, T. Nakatani","doi":"10.3131/JVSJ2.60.372","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.372","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"25 1","pages":"372-375"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89572006","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Horie, K. Asanagi, T. Myojin, T. Higuchi, Y. Yamada, M. Sasaki
Field emission features from Si and W tips are drastically improved upon coating even with simple carbon ˆlms. In this paper, in order to obtain clues to clarify the mechanism, we examine atomistic STM observations including local barrier height (LBH) and ˆeld emission imagings of the carbon ˆlms. And we also examine the ˆeld emission features from the shape-controlled W tips before and after the carbon coatings, enabling us to estimate the local electric ˆeld at the tip apex. From the STM observations, we ˆnd that the carbon ˆlm consists of nm-scale grains with various electronic properties and that the FE current varies grain by grain and is higher near the edge of each grain. The eŠective work functions evaluated from the slopes of the Fowler-Nordheim (FN) plot are constant regardless of the thickness of the carbon coating, although they are largely scattered for the ˆlms thinner than 1 nm. On the basis of the observed results, we discuss the mechanism of low macroscopic ˆeld emission from carbon ˆlms.
{"title":"Field Emission from Carbon Films with No Protrusions with High Aspect Ratios","authors":"S. Horie, K. Asanagi, T. Myojin, T. Higuchi, Y. Yamada, M. Sasaki","doi":"10.3131/JVSJ2.60.13","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.13","url":null,"abstract":"Field emission features from Si and W tips are drastically improved upon coating even with simple carbon ˆlms. In this paper, in order to obtain clues to clarify the mechanism, we examine atomistic STM observations including local barrier height (LBH) and ˆeld emission imagings of the carbon ˆlms. And we also examine the ˆeld emission features from the shape-controlled W tips before and after the carbon coatings, enabling us to estimate the local electric ˆeld at the tip apex. From the STM observations, we ˆnd that the carbon ˆlm consists of nm-scale grains with various electronic properties and that the FE current varies grain by grain and is higher near the edge of each grain. The eŠective work functions evaluated from the slopes of the Fowler-Nordheim (FN) plot are constant regardless of the thickness of the carbon coating, although they are largely scattered for the ˆlms thinner than 1 nm. On the basis of the observed results, we discuss the mechanism of low macroscopic ˆeld emission from carbon ˆlms.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"23 1","pages":"13-17"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90966754","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"平成29年度熊谷記念真空科学論文賞，真空技術賞，真空進歩賞，真空会誌賞の審査経過と受賞業績紹介","authors":"大介 藤田","doi":"10.3131/JVSJ2.60.244","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.244","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"91 1","pages":"244-248"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76827113","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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