Study of Electromigration Failure in Solder Interconnects under Low Frequency Pulsed Direct Current Condition

Y. Kim, Allison T. Osmanson, Hossein Madanipou, C. Kim, P. Thompson, Qiao Chen
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引用次数: 1

Abstract

This paper concerns the electromigration (EM) failure mechanisms in solder interconnects under low frequency pulsed direct current (DC) conditions. In our study, the accelerated EM tests of Wafer-level Chip Scale Package (WCSP or WLCSP) samples are conducted under 4 different pulsed DC conditions: 0.1 Hz pulsed DC with duty factors (DFs) of 33%, 50%, 75%, and 100% (DC). The result of our testing suggests that there are at least two competing factors affecting the failure rate in an opposite manner under pulsed DC EM conditions. Specifically, when compared with the cumulative damage model (estimates the damage only during the on period), the failure kinetics is found to be more accelerated at high DF and decelerated at a lower DF. This conclusion is drawn from the observation that the EM failure rate shows an extremely nonlinear relationship with the DF and also that the failure occurs faster under a high DF than under solely DC conditions, which is not possible without a mechanism assisting the EM failure. Furthermore, it is found that there is a 2- stage resistance change before EM failure, an indication of the change in the dominant failure mechanism. The results may indicate that the pulsed DC effect on the EM failure mechanism is far more complex than anticipated with the possible involvement of a damage mechanism other than EM such as thermal fatigue.
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低频脉冲直流条件下焊料互连电迁移失效的研究
本文研究了在低频脉冲直流(DC)条件下焊料互连的电迁移(EM)失效机理。在我们的研究中,晶圆级芯片规模封装(WCSP或WLCSP)样品在4种不同的脉冲直流条件下进行了加速电磁测试:0.1 Hz脉冲直流,占空比(df)为33%,50%,75%和100% (DC)。我们的测试结果表明,在脉冲直流电磁条件下,至少有两个相互竞争的因素以相反的方式影响故障率。具体而言,与累积损伤模型(仅估计on周期内的损伤)相比,发现高DF时破坏动力学更加速,低DF时破坏动力学更减速。这一结论是通过观察得出的,即电磁故障率与DF呈极非线性关系,并且在高DF条件下的失效发生速度比单直流条件下更快,如果没有辅助电磁失效的机制,这是不可能的。此外,发现在电磁破坏前存在2阶段的电阻变化,这表明主导破坏机制发生了变化。结果表明,脉冲直流电对电磁破坏机制的影响远比预期的复杂,可能涉及热疲劳等电磁以外的损伤机制。
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