C. Zhenyi, Zhao Wen-chuan, Zhang Qican, Han Yu, Liu Yuankun
{"title":"Shape measurement of stressed mirror based on stereoscopic phase measuring deflectometry","authors":"C. Zhenyi, Zhao Wen-chuan, Zhang Qican, Han Yu, Liu Yuankun","doi":"10.12086/OEE.2020.190435","DOIUrl":null,"url":null,"abstract":"Stressed polishing technology transforms aspheric fabrication into spherical fabrication by applying pre-determined loads on the surface of the mirror. The key to achieve high precision of stressed polishing is to test the surface deformation with high precision. Stereoscopic phase measuring deflectometry was used to test the surface topography and the deformation of stressed mirror. After obtained unwrapped phase distribution, and combined with normal consistency constraint and gradient integral algorithm, the height distribution was finally obtained. Composition of systematic errors were simulated. Also, the errors were calibrated and removed by N-step averaging method in this system, which improved the measuring precision. In this paper, the surface topography and the deformation of a stressed mirror with a diameter of 320 mm, spherical radius of 5200 mm were measured. The measuring results were consistent with the corresponding result of CMM and finite element simulation, indicating that this proposed method is on the level of micron in terms of accuracy and more suitable for the test of stressed mirror compared with interferometer and CMM.","PeriodicalId":39552,"journal":{"name":"光电工程","volume":"112 1","pages":"190435"},"PeriodicalIF":0.0000,"publicationDate":"2020-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"光电工程","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.12086/OEE.2020.190435","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Engineering","Score":null,"Total":0}
引用次数: 0
Abstract
Stressed polishing technology transforms aspheric fabrication into spherical fabrication by applying pre-determined loads on the surface of the mirror. The key to achieve high precision of stressed polishing is to test the surface deformation with high precision. Stereoscopic phase measuring deflectometry was used to test the surface topography and the deformation of stressed mirror. After obtained unwrapped phase distribution, and combined with normal consistency constraint and gradient integral algorithm, the height distribution was finally obtained. Composition of systematic errors were simulated. Also, the errors were calibrated and removed by N-step averaging method in this system, which improved the measuring precision. In this paper, the surface topography and the deformation of a stressed mirror with a diameter of 320 mm, spherical radius of 5200 mm were measured. The measuring results were consistent with the corresponding result of CMM and finite element simulation, indicating that this proposed method is on the level of micron in terms of accuracy and more suitable for the test of stressed mirror compared with interferometer and CMM.
光电工程Engineering-Electrical and Electronic Engineering
CiteScore
2.00
自引率
0.00%
发文量
6622
期刊介绍:
Founded in 1974, Opto-Electronic Engineering is an academic journal under the supervision of the Chinese Academy of Sciences and co-sponsored by the Institute of Optoelectronic Technology of the Chinese Academy of Sciences (IOTC) and the Optical Society of China (OSC). It is a core journal in Chinese and a core journal in Chinese science and technology, and it is included in domestic and international databases, such as Scopus, CA, CSCD, CNKI, and Wanfang.
Opto-Electronic Engineering is a peer-reviewed journal with subject areas including not only the basic disciplines of optics and electricity, but also engineering research and engineering applications. Optoelectronic Engineering mainly publishes scientific research progress, original results and reviews in the field of optoelectronics, and publishes related topics for hot issues and frontier subjects.
The main directions of the journal include:
- Optical design and optical engineering
- Photovoltaic technology and applications
- Lasers, optical fibres and communications
- Optical materials and photonic devices
- Optical Signal Processing