R. Nisha, K. Madhusoodanan, T. V. Vimalkumar, K. Vijayakumar
{"title":"Effect of Indium doping on the Gas sensing behavior of Zinc oxide films obtained by Chemical spray pyrolysis method","authors":"R. Nisha, K. Madhusoodanan, T. V. Vimalkumar, K. Vijayakumar","doi":"10.1109/ISPTS.2012.6260923","DOIUrl":null,"url":null,"abstract":"NO2 gas Sensing characteristics of thin films of Zinc oxide obtained by spray pyrolysis were studied. The film thickness was about 550nm. The effect of indium doping on the sensor performance were also studied. The sensing behavior in the temperature range of 100–225°C was measured to find out the optimal working temperature.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"28 1","pages":"204-207"},"PeriodicalIF":0.0000,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISPTS.2012.6260923","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
NO2 gas Sensing characteristics of thin films of Zinc oxide obtained by spray pyrolysis were studied. The film thickness was about 550nm. The effect of indium doping on the sensor performance were also studied. The sensing behavior in the temperature range of 100–225°C was measured to find out the optimal working temperature.