В. В. Болотов, Е. В. Князев, И. В. Пономарева, К.Е. Ивлев
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引用次数: 0
Abstract
Abstract The work is devoted to the creation of a
sensor structure based on a porous silicon membrane. The
structure under study integrates a porous layer used as a gas
transport layer and a gas sensitive layer of non-stoichiometric tin
oxide. The paper investigates the morphology of the structure and
shows the gas permeability of the membrane on porous silicon.
The gas sensitivity of the test structure obtained by passing a gas-
air mixture containing NO2 has been studied.
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