{"title":"Design of High Performance Surface Transverse Waver Resonators","authors":"S.T. Wang, Mei-Hui Chung, Chunlei Yu","doi":"10.1109/ESIME.2006.1643944","DOIUrl":null,"url":null,"abstract":"Surface transverse waves (STW) resonators exhibit substantial advantages over conventional surface acoustic wave (SAW) resonators. They demonstrate higher operating frequencies, better temperature stability, higher intrinsic material quality, and etc. In this work, two low loss and high quality factor STW resonators with center frequencies at 622MHz and 1244MHz for SONET/SDH were uniquely designed and fabricated on quartz substrate. The insertion loss of the devices was as low as 3dB, loaded quality factor was as high as 1600, and sidelobe suppression reached 30dB. The temperature behavior of these two resonators were also presented by experiment with turnover temperatures at about 50degC for 622MHz and 20degC for 1244MHz, repectively","PeriodicalId":60796,"journal":{"name":"微纳电子与智能制造","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2006-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"微纳电子与智能制造","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1109/ESIME.2006.1643944","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Surface transverse waves (STW) resonators exhibit substantial advantages over conventional surface acoustic wave (SAW) resonators. They demonstrate higher operating frequencies, better temperature stability, higher intrinsic material quality, and etc. In this work, two low loss and high quality factor STW resonators with center frequencies at 622MHz and 1244MHz for SONET/SDH were uniquely designed and fabricated on quartz substrate. The insertion loss of the devices was as low as 3dB, loaded quality factor was as high as 1600, and sidelobe suppression reached 30dB. The temperature behavior of these two resonators were also presented by experiment with turnover temperatures at about 50degC for 622MHz and 20degC for 1244MHz, repectively
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