Formation of a field emission array for the efficient conversion of electron energy into X-ray radiation for the maskless X-ray lithography

I. D. Evsikov, G. Demin, P. Glagolev, N. Djuzhev, M. A. Makhiboroda, N. Chkhalo, N. Salashchenko, A. G. Kolos’ko, E. O. Popov
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Abstract

This paper discusses the technological prospects for creating a field emitter array for the efficient conversion of electron energy to X-ray radiation in a portable X-ray source. Fabrication process of a field emission array and X-ray transparent beryllium membrane is proposed. Three-dimensional model of field emission array combined with beryllium membrane was created in COMSOL Multiphysics. Dependence of X-ray conversion coefficient vs. voltage between a field-emission array and beryllium membrane was calculated and dependence of electron energy vs. electron beam radius was obtained as a result of electron transport simulation.
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用于无掩模x射线光刻的电子能量有效转换为x射线辐射的场发射阵列的形成
本文讨论了在便携式x射线源中为有效地将电子能量转换为x射线而制造场发射阵列的技术前景。提出了一种场发射阵列和x射线透明铍膜的制备工艺。在COMSOL Multiphysics中建立了场发射阵列与铍膜结合的三维模型。计算了场发射阵列与铍膜之间的x射线转换系数与电压的关系,并通过电子输运模拟得到了电子能量与电子束半径的关系。
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