I. D. Evsikov, G. Demin, P. Glagolev, N. Djuzhev, M. A. Makhiboroda, N. Chkhalo, N. Salashchenko, A. G. Kolos’ko, E. O. Popov
{"title":"Formation of a field emission array for the efficient conversion of electron energy into X-ray radiation for the maskless X-ray lithography","authors":"I. D. Evsikov, G. Demin, P. Glagolev, N. Djuzhev, M. A. Makhiboroda, N. Chkhalo, N. Salashchenko, A. G. Kolos’ko, E. O. Popov","doi":"10.1109/PowerMEMS49317.2019.20515806524","DOIUrl":null,"url":null,"abstract":"This paper discusses the technological prospects for creating a field emitter array for the efficient conversion of electron energy to X-ray radiation in a portable X-ray source. Fabrication process of a field emission array and X-ray transparent beryllium membrane is proposed. Three-dimensional model of field emission array combined with beryllium membrane was created in COMSOL Multiphysics. Dependence of X-ray conversion coefficient vs. voltage between a field-emission array and beryllium membrane was calculated and dependence of electron energy vs. electron beam radius was obtained as a result of electron transport simulation.","PeriodicalId":6648,"journal":{"name":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"117 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PowerMEMS49317.2019.20515806524","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper discusses the technological prospects for creating a field emitter array for the efficient conversion of electron energy to X-ray radiation in a portable X-ray source. Fabrication process of a field emission array and X-ray transparent beryllium membrane is proposed. Three-dimensional model of field emission array combined with beryllium membrane was created in COMSOL Multiphysics. Dependence of X-ray conversion coefficient vs. voltage between a field-emission array and beryllium membrane was calculated and dependence of electron energy vs. electron beam radius was obtained as a result of electron transport simulation.