Patternable atmospheric-pressure plasma jets with gas discharge in microfluidic channel array

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474213

H. Yamasaki, K. Terao, T. Suzuki, F. Simokawa, H. Takao

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引用次数: 4

Abstract

Application of `small area' plasma has become important for bio/medical applications. In this study, a novel device to create patternable atmospheric-pressure plasma-jet array is newly proposed, and the evaluation results of the fabricated devices are reported for the first time. The array device is fabricated by bonding a PDMS microchannel layer and a glass wafer. Discharge electrodes for plasma creation are fabricated by Au/Cr layers. Since the discharge starting voltages strongly depends on shapes and the gap of two electrodes, they were designed and selected based on the Paschen's law to lower their discharge starting voltages. Micro plasma jet array are created by multi-channel gas discharges individually in microfluidic channels on a chip, and a 2.54mm spatial resolution of plasma-jet was obtained in the first fabricated device.

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微流控通道阵列中气体放电的常压等离子体喷射器

“小面积”等离子体的应用已成为生物/医学应用的重要领域。本文提出了一种制造可模式化大气压等离子体射流阵列的新装置，并首次报道了该装置的评价结果。该阵列器件是通过粘接PDMS微通道层和玻璃晶圆来制造的。用金/铬层制备等离子体放电电极。由于放电启动电压与两电极的形状和间隙有很大的关系，因此根据Paschen定律对电极进行设计和选择，以降低其放电启动电压。通过在芯片上的微流控通道中分别进行多通道气体放电，形成了微等离子体射流阵列，在第一个装置中获得了2.54mm的空间分辨率。

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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