C. Peng, J. Lau, C. Ko, Paul Lee, E. Lin, Kai-Ming Yang, P. Lin, Tim Xia, Leo Chang, N. Liu, Curry Lin, T. Lee, Jason Wang, M. Ma, T. Tseng
{"title":"Chiplets Heterogeneous Integration on High-Density Hybrid Substrate Using an Interconnect-Layer","authors":"C. Peng, J. Lau, C. Ko, Paul Lee, E. Lin, Kai-Ming Yang, P. Lin, Tim Xia, Leo Chang, N. Liu, Curry Lin, T. Lee, Jason Wang, M. Ma, T. Tseng","doi":"10.4071/1085-8024-2021.1.000217","DOIUrl":null,"url":null,"abstract":"\n In this study, a high-density organic hybrid substrate for chiplets heterogeneous integration is investigated. Emphasis is placed on the design, materials, process, fabrication, and characterization of the hybrid substrate with an interconnect-layer. A non-linear finite element analysis is performed to show the state of stress at the vias filled with a conductive paste of the interconnect-layer.","PeriodicalId":14363,"journal":{"name":"International Symposium on Microelectronics","volume":"30 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2021-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Microelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4071/1085-8024-2021.1.000217","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this study, a high-density organic hybrid substrate for chiplets heterogeneous integration is investigated. Emphasis is placed on the design, materials, process, fabrication, and characterization of the hybrid substrate with an interconnect-layer. A non-linear finite element analysis is performed to show the state of stress at the vias filled with a conductive paste of the interconnect-layer.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
