C. Chu, H. L. Ji, C. Guo, X. Sheng, Y. S. Dong, P. Lin, T. Hu, P. Chu
{"title":"Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy","authors":"C. Chu, H. L. Ji, C. Guo, X. Sheng, Y. S. Dong, P. Lin, T. Hu, P. Chu","doi":"10.1109/INEC.2010.5425083","DOIUrl":null,"url":null,"abstract":"Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA.","PeriodicalId":6390,"journal":{"name":"2010 3rd International Nanoelectronics Conference (INEC)","volume":"21 1","pages":"985-986"},"PeriodicalIF":0.0000,"publicationDate":"2010-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 3rd International Nanoelectronics Conference (INEC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INEC.2010.5425083","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
