C. Chu, H. L. Ji, C. Guo, X. Sheng, Y. S. Dong, P. Lin, T. Hu, P. Chu
{"title":"Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy","authors":"C. Chu, H. L. Ji, C. Guo, X. Sheng, Y. S. Dong, P. Lin, T. Hu, P. Chu","doi":"10.1109/INEC.2010.5425083","DOIUrl":null,"url":null,"abstract":"Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA.","PeriodicalId":6390,"journal":{"name":"2010 3rd International Nanoelectronics Conference (INEC)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2010-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 3rd International Nanoelectronics Conference (INEC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INEC.2010.5425083","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA.
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