Research on field calibration method of straightness in five-degree-of-freedom measurement

Q3 Engineering 光电工程 Pub Date : 2020-09-17 DOI:10.12086/OEE.2020.190451
Sun Yuhao, Duan Fajie, Jiang Jiajia, Fu Xiao, Zhang Cong, Li Wenzheng
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Abstract

The field calibration of straightness is an important method to ensure the accuracy of on-line measurement. Based on the transceiver integrated laser five-degree-of-freedom measurement structure, the field calibration model was established aiming at the Abbe error, and the imaging error of retroreflector caused by the calibration platform. According to the calibration model and the angle measurement results of the five-degree-of-freedom measuring device, a compensation method of straightness calibration errors was proposed. Experimental results showed that the calibration coefficient error was within 0.2% when using the calibration method, and the calibration errors of straightness were effectively reduced. The calibration method made the error of calibration coefficient reduce to less than 0.2%, and effectively improved the accuracy of straightness field calibration.
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五自由度测量中直线度现场标定方法研究
直线度的现场标定是保证在线测量精度的重要手段。基于收发器集成式激光五自由度测量结构,针对标定平台造成的阿贝误差和后向反射镜成像误差,建立了现场标定模型。根据标定模型和五自由度测量装置的角度测量结果,提出了一种直线度标定误差补偿方法。实验结果表明,该标定方法标定系数误差在0.2%以内,有效减小了直线度标定误差。该标定方法使标定系数误差减小到0.2%以内,有效提高了直线度现场标定精度。
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光电工程
光电工程 Engineering-Electrical and Electronic Engineering
CiteScore
2.00
自引率
0.00%
发文量
6622
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