Erratum: “Formation and desorption of nickel hexafluoroacetylacetonate Ni(hfac)2 on a nickel oxide surface in atomic layer etching processes” [J. Vac. Sci. Technol. A 38, 052602 (2020)]
Abdulrahman H. Basher, M. Krstić, K. Fink, Tomoko Ito, K. Karahashi, W. Wenzel, S. Hamaguchi
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