Optical Fiber Hydrogen Sensors with Pd/W03 Composite Thin Film by Magntron Co-Sputtering

Minghong Yang, Yan Sun, Dongsheng Zhang, D. Jiang
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引用次数: 1

Abstract

A fiber-optic hydrogen gas sensor using composite palladium and tungsten trioxide (WO3) was proposed and characterized. This sensor utilizes the absorption of the evanescent field interaction in the clad of Pd/WO3 thin film which was prepared by magnetron co-sputtering process, coated on a silica core. Modulation of optical power intensity is observed, a clear increase of power with hydrogen and decrease of power without hydrogen can be concluded. Compared to pure Pd sensitive material, an improvement of response time is reported. Meanwhile, there is no recovery in nitrogen environment, and recovery happens only in oxygen-existing condition. It is suspected that the recovery process is connected to oxidation of the Pd/WO3 surface.
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磁控共溅射Pd/W03复合薄膜光纤氢传感器
提出了一种由复合钯和三氧化钨(WO3)构成的光纤氢气传感器,并对其进行了表征。该传感器利用磁控共溅射法制备的Pd/WO3薄膜包层对倏逝场相互作用的吸收,并包覆在硅芯上。观察到光功率强度的调制,有氢时光功率明显增加,无氢时光功率明显降低。与纯Pd敏感材料相比,响应时间有所改善。同时,在含氮环境中没有回收,只有在含氧环境中才有回收。怀疑回收过程与Pd/WO3表面氧化有关。
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