Surface testing methods of aspheric optical elements

师途 Shi Tu, 杨甬英 Yang Yongying, 张. Z. Lei, 刘. L. Dong
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引用次数: 9

Abstract

In this paper,several aspheric testing methods for different fabrication steps and their new research progresses are introduced. Especially,we emphasis on the testing methods for precision polishing step,in which subaperture stitching interferometric testing and non-null partial compensating testing method are described in detail. Moreover,several combined interferometric testing methods which perform well in measuring large and steep aspherics are introduced. In addition,we provide a general description of free-form surface testing. The further development of aspheric surface testing methods is also prospected.
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非球面光学元件的表面检测方法
本文介绍了几种不同加工步骤的非球面检测方法及其最新研究进展。重点介绍了精密抛光步骤的测试方法,详细介绍了子孔径拼接干涉测试和非零部分补偿测试方法。此外,还介绍了几种能很好地测量大、陡非球面的组合干涉测试方法。此外,我们还提供了自由曲面测试的一般描述。展望了非球面检测方法的进一步发展。
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