Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474211

N. Wang, S. Yoshida, M. Kumano, Y. Kawai, S. Tanaka, M. Esashi

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引用次数: 1

Abstract

This paper reports on the fabrication and characterization of a novel laterally-driven piezoelectric bimorph MEMS actuator with high aspect-ratio (AR) lead-zirconate-titanate (PZT) structure. In the fabrication process, the PZT structures (AR=8) was successfully fabricated by filling deep Si trenches with nanocomposite sol-gel PZT. A lateral displacement of 10 μm was obtained from a 500-μm-long actuator by bimorph actuation at driving voltages of +25 V/-5 V, while no vertical cross-motion as well as no initial vertical bending was observed. Compared with conventional capacitive comb-drive actuators, this actuator occupies a much smaller area to generate identical force or displacement. This actuator has the potential to become a new actuation technology in MEMS.

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基于溶胶-凝胶高纵横比PZT结构的横向驱动压电双晶片MEMS驱动器

本文报道了一种具有高宽高比(AR)铅锆钛酸盐(PZT)结构的新型横向驱动压电双晶片MEMS驱动器的制备和表征。在制备过程中，用纳米复合溶胶-凝胶PZT填充深Si沟槽，成功制备了AR=8的PZT结构。在+25 V/-5 V驱动电压下，双晶片驱动500 μm长的驱动器产生了10 μm的横向位移，但没有观察到垂直交叉运动和初始垂直弯曲。与传统的电容式梳子驱动作动器相比，该作动器占用更小的面积来产生相同的力或位移。该驱动器具有成为微机电系统中一种新的驱动技术的潜力。

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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