Trapping and Manipulation of Bioparticles by a 3-D Optimal Multiple-Designed Offset Carbon-Microelectrode Array in C-MEMS Fabrication

M. Malik, Tiejia Shi, Zirong Tang
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Abstract

A dielectrophoretic approach with latest developed three-dimensional (3-D) carbon micro-electro-mechanical system (C-MEMS) has been extended as a potential route with idyllic solution to recommend a low-cost, biocompatible and high throughput manipulation and positioning for bio-particles as compared to 2D-planar microelectrodes. Presented in this paper is a novel platform for modelling and simulation of C-MEMS microfabrication process for dielectrophoresis (DEP) force based on various 3-D offset-microelectrode configurations. Numerical solutions are employed to investigate the upshots of multi-designed microelectrodes, applied voltage, electrode edge-to-edge gap and geometric size of microelectrodes on the electric field intensity gradient, induced by an AC voltage for the deployment of broad categories of bioparticles creation, utilization and their manipulation (separation, concentration, transportation and focusing). Sharp edge electrodes are the principle focus of this paper for DEP manipulation that is more convenient to enhance the electric field intensity distribution. The results show that square column electrodes configuration comparatively create large gradient magnitude in electric field intensity as compared to all other configurations. It is also observed that electric field extends drastically with increases in microelectrode height. These findings are consistent with literature experimental reports and will provide vital strategy for optimal design of DEP devices with 3-D C-MEMS.
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C-MEMS制造中三维优化多设计偏移碳微电极阵列捕获和操纵生物微粒
与2d平面微电极相比,最新开发的三维(3-D)碳微机电系统(C-MEMS)的介电泳方法已被扩展为一种具有田园般的解决方案的潜在途径,以推荐低成本,生物相容性和高通量的生物颗粒操作和定位。本文提出了一种基于不同三维偏置微电极结构的C-MEMS介电泳(DEP)力微加工过程建模与仿真的新平台。采用数值解来研究多种设计的微电极、施加电压、电极边缘到边缘的间隙和微电极的几何尺寸对电场强度梯度的影响,这些影响是由交流电压引起的,用于广泛类别的生物颗粒的制造、利用及其操作(分离、浓缩、运输和聚焦)的部署。锐边电极是本文的主要重点,它更便于增强电场强度分布。结果表明,与其他电极结构相比,方柱电极结构能产生较大的电场强度梯度幅度。还观察到电场随着微电极高度的增加而急剧扩大。这些发现与文献实验报告一致,将为三维C-MEMS DEP器件的优化设计提供重要策略。
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