{"title":"Laser microstructuring of congruent lithium niobate by UV ps-pulses","authors":"M. Stolze, T. Herrmann, B. Weigand, J. L’huillier","doi":"10.1109/ISAF.2012.6297765","DOIUrl":null,"url":null,"abstract":"We present single shot experiments at different pulse energies for LiNbO<sub>3</sub> on c<sup>+</sup>-side and c<sup>-</sup>-side by using a laser wavelength of 355 nm and a pulse duration of about 10 ps. Furthermore, we demonstrate laser micromachined grooves with high spatial pulse overlap on the c<sup>+</sup>-side of LiNbO<sub>3</sub>. Here a (rms) sidewall roughness as low as 20 nm has been achieved at an ablation depth of 1.2μm.","PeriodicalId":20497,"journal":{"name":"Proceedings of ISAF-ECAPD-PFM 2012","volume":"120 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISAF-ECAPD-PFM 2012","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2012.6297765","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
We present single shot experiments at different pulse energies for LiNbO3 on c+-side and c--side by using a laser wavelength of 355 nm and a pulse duration of about 10 ps. Furthermore, we demonstrate laser micromachined grooves with high spatial pulse overlap on the c+-side of LiNbO3. Here a (rms) sidewall roughness as low as 20 nm has been achieved at an ablation depth of 1.2μm.
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