Ming-Yuan Cheng, W.-Y. Chang, L. Tsao, S.-A. Yang, Y. Yang, W. Shih, F. Chang, S. Chang, K. Fan
{"title":"Design and fabrication of an artificial skin using PI-copper films","authors":"Ming-Yuan Cheng, W.-Y. Chang, L. Tsao, S.-A. Yang, Y. Yang, W. Shih, F. Chang, S. Chang, K. Fan","doi":"10.1109/MEMSYS.2007.4433149","DOIUrl":null,"url":null,"abstract":"This paper presents the design, fabrication and measurement of a flexible 8 times 8 temperature and tactile sensing array which will be used as the artificial skin for robot applications. The temperature and pressure sensing elements are heterogeneously integrated on a flexible copper-PI film using micromachining techniques. The tactile sensing elements are fabricated by dispensing conductive polymer on the pre-defined inter-digital copper electrodes. Discrete temperature sensor chips are employed as the temperature sensing elements. Scanning circuits are implemented and experimental results are also provided.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 1","pages":"389-392"},"PeriodicalIF":0.0000,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"23","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433149","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 23
Abstract
This paper presents the design, fabrication and measurement of a flexible 8 times 8 temperature and tactile sensing array which will be used as the artificial skin for robot applications. The temperature and pressure sensing elements are heterogeneously integrated on a flexible copper-PI film using micromachining techniques. The tactile sensing elements are fabricated by dispensing conductive polymer on the pre-defined inter-digital copper electrodes. Discrete temperature sensor chips are employed as the temperature sensing elements. Scanning circuits are implemented and experimental results are also provided.
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