PVdF based micro actuator

Abstract

Micro cantilever actuator based on Poly (vinylidene fluoride) (PVdF) is fabricated and tested for its performance. β phase PVdF films are suitable for this purpose. Attempt is made to achieve β phase PVdF films using spin coating technique and annealing the films at various temperatures. The films are metalized and poled at high electric field (70MV/m) to enhance and stabilize the phase. PVdF cantilever is fabricated using special arrangement made with the help of sharp blades. Two cantilevers of same thickness and width of the 20µm and 500µm respectively and different lengths of 2mm and 3mm are fabricated. Actuation of the cantilevers is tested in terms of deflection by applying the electric field across the cantilever from 50–300V in the steps of 50V. The maximum actuation at 300V is 100µm for 2 mm length and 170 µm for 3mm length. Hysteresis is also observed. The results obtained are reported and discussed.