Static analysis of a large-displacement low-voltage micro actuator

Abstract

The large-displacement, low-voltage and fast response are the research direction of the micro actuator. The micro actuator of the electrostatic transverse loading exist problems of the oversized voltage or undersized displacement. The model of a large-displacement low-voltage micro actuator is presented based on the principle of the vertically-horizontally bending. The elastic force is transformed from the restoring force to the driving force. The deflection equation of the micro beam is derived. The simulation shows that the displacement is as big as 145μm; the driving voltage is as low as 5V. The displacement and driving voltage are superior to the current micro actuator performance.