Design and test of MEMS gyroscope control system based on LMSD

2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2017-08-01 DOI:10.1109/3M-NANO.2017.8286267

Shuai Guo, Xudong Zheng, Yiyu Lin, Wei Ma, Zhong-he Jin

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Abstract

In order to improve the performance of MEMS gyroscopes, the least mean square demodulation (LMSD) algorithm is utilized in MEMS gyroscope control system. By using Matlab tool, the simulation result shows that the LMSD algorithm has better noise suppression performance than multiplicative demodulation (MD). LMSD algorithm is carried out in field-programmed-gate-array (FPGA) and experimental results are in good agreement with the simulation. Combining with automatic gain control (AGC) and phase-locked loop (PLL) technology, the amplitude variance and phase variance of drive mode are respectively 62ppm and 0.001°. The nonlinearity of scale factor based on LMSD algorithm is 0.068%. Moreover, the gyroscope using LMSD exhibits a bias stability (BS) of 1.8°/h and an angle random walk (ARW) of 0.031°/Vh, better than the BS 6.7°/h and ARW 0.114°/Vh using MD. The experiment proves the feasibility and effectiveness of LMSD algorithm in the digital control system of MEMS gyroscope.

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基于LMSD的MEMS陀螺仪控制系统的设计与测试

为了提高MEMS陀螺仪的性能，将最小均方解调(LMSD)算法应用于MEMS陀螺仪控制系统中。利用Matlab仿真工具，仿真结果表明LMSD算法比乘解调(MD)具有更好的噪声抑制性能。LMSD算法在现场可编程门阵列(FPGA)上实现，实验结果与仿真结果吻合较好。结合自动增益控制(AGC)和锁相环(PLL)技术，驱动模式的幅度方差和相位方差分别为62ppm和0.001°。基于LMSD算法的尺度因子非线性为0.068%。采用LMSD的陀螺仪的偏置稳定性(BS)为1.8°/h，角度随机游走(ARW)为0.031°/Vh，优于采用MD的BS 6.7°/h和ARW 0.114°/Vh，实验证明了LMSD算法在MEMS陀螺仪数字控制系统中的可行性和有效性。

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2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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