Asymmetric microstructures for high light extraction and light pattern modulation

Jae-jun Kim, D. Keum, K. Jeong
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Abstract

This work presents a novel method of fabricating asymmetric microstructures for light extraction enhancement and light pattern modulation. Asymmetric microstructures were fabricated at wafer level by two-step photolithography, surface energy modulation, and thermal reflow. The microstructures improve light extraction efficiency by suppressing total internal reflection and modulate far-field light distribution by changing incident angle of light. Light extraction and light pattern can be changed by design of asymmetric microstructures. These structures can be utilized for display and lighting applications.
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高光提取和光模式调制的不对称微结构
本文提出了一种用于光提取增强和光模式调制的非对称微结构的新方法。采用两步光刻、表面能调制和热回流技术在晶圆级制备了非对称微结构。该微结构通过抑制全内反射来提高光提取效率,并通过改变光的入射角来调节远场光分布。不对称微结构的设计可以改变光的提取和光的模式。这些结构可用于显示和照明应用。
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