Polymer based Acoustic Wave Sensor Using Hot Embossing Technique

Abstract

The objective of this research is to develop a highly sensitive acoustic wave sensor using a tunneling current. The tunneling current device is fabricated with the hot embossing technology. Since polymethyl methacrylate (PMMA) is less expensive, has little stiffness, and is easier to work with micro-machining process compared to traditional silicon-based tunneling sensors, we fabricate the tip structure on the material using the hot embossing process. First, the frequency response of the tunneling device is measured by a piezoelectric transducer (PZT) and laser vibrometer to find the resonance frequency. Then the performance of the device is characterized by measuring the acoustic wave, which has the resonance frequency.