Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495759
Ferhat Bayram, D. Gajula, Balaadithya Uppalapati, Digangana Khan, G. Koley
In the recent years, studies to develop near-infrared light modulators for imaging and sensing applications have attracted great attention. Here, we report on phase transition induced optical transmittance characteristics variation of electrochromic VO2 thin film grown on GaN membrane for light modulation application. Insulator metal transition (IMT) phase of the VO2 thin film was triggered using an electric field applied on the interdigitated metal electrodes deposited on it. Voltage triggered phase transition resulted in ~45% change in resistance of the thin film and ~11% reduction in transmitted optical power for a 1550 nm laser. Moreover, near-infrared light modulation utilizing IMT properties of the VO2 thin film-based membrane was demonstrated by applying various voltages with pulse widths ranging from 2 ms to 300 µs,
{"title":"Electrical Modulation Tramsmitted IR Light Through VO2 Thin Film on GaN Membranes","authors":"Ferhat Bayram, D. Gajula, Balaadithya Uppalapati, Digangana Khan, G. Koley","doi":"10.1109/Transducers50396.2021.9495759","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495759","url":null,"abstract":"In the recent years, studies to develop near-infrared light modulators for imaging and sensing applications have attracted great attention. Here, we report on phase transition induced optical transmittance characteristics variation of electrochromic VO2 thin film grown on GaN membrane for light modulation application. Insulator metal transition (IMT) phase of the VO2 thin film was triggered using an electric field applied on the interdigitated metal electrodes deposited on it. Voltage triggered phase transition resulted in ~45% change in resistance of the thin film and ~11% reduction in transmitted optical power for a 1550 nm laser. Moreover, near-infrared light modulation utilizing IMT properties of the VO2 thin film-based membrane was demonstrated by applying various voltages with pulse widths ranging from 2 ms to 300 µs,","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"21 1","pages":"593-596"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74308620","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495491
N. Lovecchio, G. de Cesare, A. Nascetti, F. Costantini, D. Caputo
This work reports on the development of a large-area thin film heater for lab-on chip applications. The device is a chromium/aluminum/chromium stacked structure with a spiral shape fabricated on a $5times 5text{cm}^{2}$ glass substrate through microelectronic technologies. Its geometry has been designed and optimized by COMSOL Multiphysics in terms of pitch and line width to achieve a uniform temperature distribution. Measurements performed with a thermo-camera show temperature variation below 1.5°C over 5cm2 area in excellent agreement with numerical modeling. To our knowledge, this is the largest area with such temperature uniformity achieved with a single heater in lab-on-chip systems. This opens the route for large-area thermal treatments as multiple-well DNA amplification or cell culture.
{"title":"Large-Area Thin Film Heater for Thermal Treatments in Lab-on-Chip","authors":"N. Lovecchio, G. de Cesare, A. Nascetti, F. Costantini, D. Caputo","doi":"10.1109/Transducers50396.2021.9495491","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495491","url":null,"abstract":"This work reports on the development of a large-area thin film heater for lab-on chip applications. The device is a chromium/aluminum/chromium stacked structure with a spiral shape fabricated on a $5times 5text{cm}^{2}$ glass substrate through microelectronic technologies. Its geometry has been designed and optimized by COMSOL Multiphysics in terms of pitch and line width to achieve a uniform temperature distribution. Measurements performed with a thermo-camera show temperature variation below 1.5°C over 5cm2 area in excellent agreement with numerical modeling. To our knowledge, this is the largest area with such temperature uniformity achieved with a single heater in lab-on-chip systems. This opens the route for large-area thermal treatments as multiple-well DNA amplification or cell culture.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"33 1","pages":"639-642"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75509876","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495684
Zijing Zhou, Yuning Liang, Wenxi Huang, Bizhang Zhong, Jindong Ye, K. Tao, Jin Wu
Fabrication of stretchable sensor has been increasingly attractive for emerging wearable applications in health assessment, internet-of-things, electronic skin, robotics, and environment monitoring. Nitrogen dioxide (NO2) is one of the most harmful gases to the human body and environment. Here, we demonstrate a novel high-sensitivity (233%/ppm) NO2 gas sensor based on polyvinyl alcohol (PV A)-cellulose nanofibril (CNF) organohydrogel. This organohydrogel exhibits remarkable stretchability (break strain 672%), and high mechanical strength (up to more than 370 KPa). Besides, the PVA-CNF organohydrogels remained in their original condition without any damage on the surface after stretching 15 times. Basing on the crosslinked hydrogen bond, this PV A-CNF organohydrogel exhibits repairability and remoldability. The addition of glycerol increases the antifreezing ability and long-lasting moisture.
{"title":"High Sensitive Nitrogen Dioxide Sensor Based on Polyvinyl Alcohol-Cellulose Nanofibril Organohydrogel with Repairability, Anti-Freezing, Stretchability, Long-Lasting Moisture, and High Strength","authors":"Zijing Zhou, Yuning Liang, Wenxi Huang, Bizhang Zhong, Jindong Ye, K. Tao, Jin Wu","doi":"10.1109/Transducers50396.2021.9495684","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495684","url":null,"abstract":"Fabrication of stretchable sensor has been increasingly attractive for emerging wearable applications in health assessment, internet-of-things, electronic skin, robotics, and environment monitoring. Nitrogen dioxide (NO2) is one of the most harmful gases to the human body and environment. Here, we demonstrate a novel high-sensitivity (233%/ppm) NO2 gas sensor based on polyvinyl alcohol (PV A)-cellulose nanofibril (CNF) organohydrogel. This organohydrogel exhibits remarkable stretchability (break strain 672%), and high mechanical strength (up to more than 370 KPa). Besides, the PVA-CNF organohydrogels remained in their original condition without any damage on the surface after stretching 15 times. Basing on the crosslinked hydrogen bond, this PV A-CNF organohydrogel exhibits repairability and remoldability. The addition of glycerol increases the antifreezing ability and long-lasting moisture.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"102 1","pages":"164-167"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75870989","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495569
J. Joseph, Mira Wehr, H. Miki, M. Ohtsuka, M. Kohl
We investigate the cross coupling between parallel operating thermo-magnetic generators (TMGs) on their dynamic performance and power output. TMGs are an emerging technology for waste heat recovery. Here, TMG operation relies on the abrupt drop of magnetization at the Curie temperature of a magnetic shape memory (MSMA) film of Ni-Mn-Ga mounted at the front of a cantilever and on rapid heat transfer due to the film's large surface-to-volume ratio. Parallel designs are highly demanded to increase power output. When exposed to heat source temperatures Ts of 110-170 °C, resonant self-oscillation of each cantilever is excited in the range of 50-70 Hz resulting in a power output up to $30 text{mW}/text{cm}^{3}$ for each TMG. At low Ts, oscillations remain stable even for a small distance $D$ of 0.4 mm between cantilevers, while at $text{Ts} geq 150^{circ}mathrm{C}$, instabilities occur below $D=1$ mm affecting power output.
{"title":"Coupling Effects in Parallel Thermomagnetic Generators Based on Resonant Self-Actuation","authors":"J. Joseph, Mira Wehr, H. Miki, M. Ohtsuka, M. Kohl","doi":"10.1109/Transducers50396.2021.9495569","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495569","url":null,"abstract":"We investigate the cross coupling between parallel operating thermo-magnetic generators (TMGs) on their dynamic performance and power output. TMGs are an emerging technology for waste heat recovery. Here, TMG operation relies on the abrupt drop of magnetization at the Curie temperature of a magnetic shape memory (MSMA) film of Ni-Mn-Ga mounted at the front of a cantilever and on rapid heat transfer due to the film's large surface-to-volume ratio. Parallel designs are highly demanded to increase power output. When exposed to heat source temperatures Ts of 110-170 °C, resonant self-oscillation of each cantilever is excited in the range of 50-70 Hz resulting in a power output up to $30 text{mW}/text{cm}^{3}$ for each TMG. At low Ts, oscillations remain stable even for a small distance $D$ of 0.4 mm between cantilevers, while at $text{Ts} geq 150^{circ}mathrm{C}$, instabilities occur below $D=1$ mm affecting power output.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"39 1","pages":"463-466"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74060337","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495469
Feihonv Xu, Zhitao Zhou, Haovuan Li, Xiaoling Wei, T. Tao
We report a set of flexible microelectrode arrays (MEAs) with in-plane shielding designs that are capable of high quality electrocorticography (ECoG) signal acquisition. In this work, we have designed and fabricated two different shapes of shielding (i.e. hook-like and bell-type wires) and evaluated their shielding performances. With shielding, our flexible MEAs have better resistance to external disturbances while maintaining good conformability with high-quality signals. We have performed both simulation and in vitro experiments to evaluate the efficiency of two shielding designs, showing that bell-type devices have better performance. As a proof-of-concept, we implanted the device on the brain in a mouse model and high signal-to-noise ratio (SNR) neural signals have been recorded successfully.
{"title":"Flexible Microelectrode Arrays with In-Plane Shielding for High Quality Electrocorticography Recording","authors":"Feihonv Xu, Zhitao Zhou, Haovuan Li, Xiaoling Wei, T. Tao","doi":"10.1109/Transducers50396.2021.9495469","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495469","url":null,"abstract":"We report a set of flexible microelectrode arrays (MEAs) with in-plane shielding designs that are capable of high quality electrocorticography (ECoG) signal acquisition. In this work, we have designed and fabricated two different shapes of shielding (i.e. hook-like and bell-type wires) and evaluated their shielding performances. With shielding, our flexible MEAs have better resistance to external disturbances while maintaining good conformability with high-quality signals. We have performed both simulation and in vitro experiments to evaluate the efficiency of two shielding designs, showing that bell-type devices have better performance. As a proof-of-concept, we implanted the device on the brain in a mouse model and high signal-to-noise ratio (SNR) neural signals have been recorded successfully.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"16 1","pages":"1444-1447"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74799887","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495551
A. Takabayashi, H. Sattari, Pierre Edinger, P. Verheyen, K. Gylfason, W. Bogaerts, N. Quack
The integration of MEMS transducers in photonic integrated circuits provides opportunities for high efficiency photonic modulation and dynamic routing on-chip. We here present an electrostatically actuated, silicon photonic MEMS $2 times 2$ power coupler, fabricated in IMEC's iSiPP50G platform followed by a dedicated MEMS release sequence. The in-plane, mechanical tuning mechanism provides analog power coupling between waveguides in a small form factor. With our experimental demonstration of broad, > 30 nm optical bandwidth, high extinction ratio of > 27 dB, and a low actuation voltage of only 6 V, the coupler fulfills the requirements for large-scale integration in next generation reconfigurable PICs.
{"title":"Continuously Tunable Silicon Photonic MEMS $2 times 2$ Power Coupler","authors":"A. Takabayashi, H. Sattari, Pierre Edinger, P. Verheyen, K. Gylfason, W. Bogaerts, N. Quack","doi":"10.1109/Transducers50396.2021.9495551","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495551","url":null,"abstract":"The integration of MEMS transducers in photonic integrated circuits provides opportunities for high efficiency photonic modulation and dynamic routing on-chip. We here present an electrostatically actuated, silicon photonic MEMS $2 times 2$ power coupler, fabricated in IMEC's iSiPP50G platform followed by a dedicated MEMS release sequence. The in-plane, mechanical tuning mechanism provides analog power coupling between waveguides in a small form factor. With our experimental demonstration of broad, > 30 nm optical bandwidth, high extinction ratio of > 27 dB, and a low actuation voltage of only 6 V, the coupler fulfills the requirements for large-scale integration in next generation reconfigurable PICs.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"36 1","pages":"447-450"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79806254","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495445
Longchun Wang, Zhejun Guo, Bowen Ji, Ye Xi, Bin Yang, Jingquan Liu
This paper presents a silicon recording probe with integrated in-situ Ag/AgCl reference electrode (ISA/ARE) for simultaneous pH sensing and electrophysiology recordings for the application neuroscience. The preparation of in-situ silver layer and its chlorination are realized by a constant current electrochemical plating method. The repeatable Ag/AgCl layer with stable potential has been verified by X-ray diffraction and electrochemical measurements. Meanwhile, the pH sensitivity of the combination of Iridium oxide (IrOx) electrodes and ISA/ARE is 54.7mV/pH. The area of ISA/ARE is only 7000µm2, which is highly compatible with the preparation process of silicon probes, and is suitable for integration into the front of micro shanks as an in-situ detection reference. In short, the unique fabrication method to realize miniaturized and integrated in-situ reference electrode is of great significance to biosensors.
{"title":"A Silicon Recording Probe with Integrated Ag/Agcl Reference Electrode for In-Situ PH Sensing","authors":"Longchun Wang, Zhejun Guo, Bowen Ji, Ye Xi, Bin Yang, Jingquan Liu","doi":"10.1109/Transducers50396.2021.9495445","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495445","url":null,"abstract":"This paper presents a silicon recording probe with integrated in-situ Ag/AgCl reference electrode (ISA/ARE) for simultaneous pH sensing and electrophysiology recordings for the application neuroscience. The preparation of in-situ silver layer and its chlorination are realized by a constant current electrochemical plating method. The repeatable Ag/AgCl layer with stable potential has been verified by X-ray diffraction and electrochemical measurements. Meanwhile, the pH sensitivity of the combination of Iridium oxide (IrOx) electrodes and ISA/ARE is 54.7mV/pH. The area of ISA/ARE is only 7000µm2, which is highly compatible with the preparation process of silicon probes, and is suitable for integration into the front of micro shanks as an in-situ detection reference. In short, the unique fabrication method to realize miniaturized and integrated in-situ reference electrode is of great significance to biosensors.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"46 1","pages":"1412-1415"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79351228","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495703
Hao Wang, Jianbing Xie, Honglong Chang
This paper reports a closed-loop MEMS disk resonator gyroscope (DRG) with configurable measurement range and bandwidth. A configurable ASIC is employed for the measurement range and bandwidth configuration and the design methods of measurement range and bandwidth are studied. By changing the registers of the ASIC, the measurement range is configured from 450 to 2250°/s, and the bandwidth is configured from 10 to 100 Hz. Meanwhile, experiments prove that increasing the measurement range or bandwidth will deteriorate the accuracy of the gyroscope to some degree.
{"title":"A Configurable Measurement Range and Bandwidth Mems Disk Resonator Gyroscope","authors":"Hao Wang, Jianbing Xie, Honglong Chang","doi":"10.1109/Transducers50396.2021.9495703","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495703","url":null,"abstract":"This paper reports a closed-loop MEMS disk resonator gyroscope (DRG) with configurable measurement range and bandwidth. A configurable ASIC is employed for the measurement range and bandwidth configuration and the design methods of measurement range and bandwidth are studied. By changing the registers of the ASIC, the measurement range is configured from 450 to 2250°/s, and the bandwidth is configured from 10 to 100 Hz. Meanwhile, experiments prove that increasing the measurement range or bandwidth will deteriorate the accuracy of the gyroscope to some degree.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"11 1","pages":"1283-1286"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81512663","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495554
Muzhen Xu, J. Harmon, T. Hasunuma, A. Isozaki, K. Goda
Microalgae-based methods used in heavy metal (HM)-polluted wastewater treatment have attracted increasing attention in recent decades, due to their eco-friendliness, profitability, and sustainability. Unfortunately, their low HM removal efficiency hinders them from practical use. In this work, we report an AI-on-a-chip method, a combination of AI and lab-on-a-chip technology, for identifying Euglena gracilis (a microalgal species) cells with high HM removal efficiency through a morphological meta-feature. In the near future, the implementation of the morphological meta-feature in a high-throughput cell sorting process will pave the way for realizing directed-evolution-based development of microalgae with extremely high HM removal efficiency for practical wastewater treatment worldwide.
{"title":"AI ON A CHIP FOR IDENTIFYING MICROALGAL CELLS WITH HIGH HEAVY METAL REMOVAL EFFICIENCY","authors":"Muzhen Xu, J. Harmon, T. Hasunuma, A. Isozaki, K. Goda","doi":"10.1109/Transducers50396.2021.9495554","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495554","url":null,"abstract":"Microalgae-based methods used in heavy metal (HM)-polluted wastewater treatment have attracted increasing attention in recent decades, due to their eco-friendliness, profitability, and sustainability. Unfortunately, their low HM removal efficiency hinders them from practical use. In this work, we report an AI-on-a-chip method, a combination of AI and lab-on-a-chip technology, for identifying Euglena gracilis (a microalgal species) cells with high HM removal efficiency through a morphological meta-feature. In the near future, the implementation of the morphological meta-feature in a high-throughput cell sorting process will pave the way for realizing directed-evolution-based development of microalgae with extremely high HM removal efficiency for practical wastewater treatment worldwide.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"17 1","pages":"385-388"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84433646","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495591
Berke Demiralp, H. S. Pisheh, Berk Kucukoglu, Utku Hatipoglu, M. Hanay
Controlling the amount and direction of buckling at micro- and nano-scale efficiently opens up avenues for novel actuation and sensor applications. Earlier platforms that can achieve a full and non-thermal control of microscopic buckling operated only with a time resolution of 40 ms. Here, we have measured the buckling amount of a beam starting from unbuckled position and reaching to large post-buckling deformations by collecting secondary electrons under scanning electron microscope. Line mode is used for ultrafast measurements with 33kHz scan frequency, and a displacement noise floor of 40pm/√Hz was obtained. Moreover, by further reduction in the device dimensions, the buckling threshold voltage was reduced by a factor of three compared to similar platforms.
{"title":"Monitoring Micromechanical Buckling at High-Speed for Sensing and Transducer Applications","authors":"Berke Demiralp, H. S. Pisheh, Berk Kucukoglu, Utku Hatipoglu, M. Hanay","doi":"10.1109/Transducers50396.2021.9495591","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495591","url":null,"abstract":"Controlling the amount and direction of buckling at micro- and nano-scale efficiently opens up avenues for novel actuation and sensor applications. Earlier platforms that can achieve a full and non-thermal control of microscopic buckling operated only with a time resolution of 40 ms. Here, we have measured the buckling amount of a beam starting from unbuckled position and reaching to large post-buckling deformations by collecting secondary electrons under scanning electron microscope. Line mode is used for ultrafast measurements with 33kHz scan frequency, and a displacement noise floor of 40pm/√Hz was obtained. Moreover, by further reduction in the device dimensions, the buckling threshold voltage was reduced by a factor of three compared to similar platforms.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"12 1","pages":"627-630"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85242831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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