表面処理したアルミニウム合金のガス放出特性—開発した測定装置の性能評価とガス放出速度測定—;表面処理したアルミニウム合金のガス放出特性—開発した測定装置の性能評価とガス放出速度測定—;Outgassing Properties of Aluminum Alloy with Surface Treatment —Performance Assessment of Developed Measurement System and Outgassing Rate Measurement—

Abstract

Hiroshima 720  2104, Japan ( Received November 27, 2016, Accepted August 20, 2017 ) We developed an outgassing measurement system which can measure by two methods ``Switching Between Two Pumping Paths method'' and ``Throughput method''. As a result of calibrating the two vacuum gauges on the upstream side of the sample ‰ow path and the blank ‰ow path, we obtained the calibration factor of 9.33 × 10 － 1 and 9.68 × 10 － 1 which the quantitative accuracy ( conˆdence level 95 ) is less than 14  . The ultimate pressure after baking at 150 ° C for 64 hours reached 5.0 × 10 － 8 Pa. As a result, the detection lower limit of the system was 5 × 10 － 12 Pa m 3 s － 1 . For an aluminum alloy sample exposed to an atmosphere of RH 50  , the outgassing rate after 20 hours was