S. N. Victoria, J. Jebaraj, I. Suni, S. Ramanathan
{"title":"Chemical Mechanical Planarization of Ruthenium with Oxone as Oxidizer","authors":"S. N. Victoria, J. Jebaraj, I. Suni, S. Ramanathan","doi":"10.1149/2.005203ESL","DOIUrl":null,"url":null,"abstract":"Potassium peroxymonosulfate (Oxone) was investigated as an oxidizing agent in silica based slurries for chemical mechanical planarization of Ru. Upon addition of oxone, the Ru removal rate increases significantly in the pH range of 1‐6. The slurry stability is poor at pH 3 and higher. At pH 2, oxone enhances the Ru removal rate even in the absence of abrasive, indicating that a soft film is formed on the Ru surface. Ru dissolution experiments show that the static etch rate is low. The Ru removal rate variation with pressure and velocity does not follow the Preston equation.","PeriodicalId":11627,"journal":{"name":"Electrochemical and Solid State Letters","volume":"100 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2012-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"27","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Electrochemical and Solid State Letters","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1149/2.005203ESL","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 27
Abstract
Potassium peroxymonosulfate (Oxone) was investigated as an oxidizing agent in silica based slurries for chemical mechanical planarization of Ru. Upon addition of oxone, the Ru removal rate increases significantly in the pH range of 1‐6. The slurry stability is poor at pH 3 and higher. At pH 2, oxone enhances the Ru removal rate even in the absence of abrasive, indicating that a soft film is formed on the Ru surface. Ru dissolution experiments show that the static etch rate is low. The Ru removal rate variation with pressure and velocity does not follow the Preston equation.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
