{"title":"Active liquid aspiration and dispensing based on an expanding PDMS composite","authors":"B. Samel, P. Griss, G. Stemme","doi":"10.1109/MEMSYS.2007.4433160","DOIUrl":null,"url":null,"abstract":"In this work we present the development of a liquid aspiration and dispensing unit which is based on a single- use thermally expanding PDMS composite. The composite actuator consists of expandable microspheres incorporated into a PDMS matrix and allows for locally altering its topography by means of individually addressable integrated heaters. Devices were designed in order to enable the generation of a cavity by the expansion of the composite actuator and are entirely fabricated from low-cost materials using wafer-level processes only. The fabricated devices successfully demonstrated controlled liquid aspiration and release thereafter of liquid volumes ranging from 180 nl to 815 nl.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"40 1","pages":"565-568"},"PeriodicalIF":0.0000,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433160","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
In this work we present the development of a liquid aspiration and dispensing unit which is based on a single- use thermally expanding PDMS composite. The composite actuator consists of expandable microspheres incorporated into a PDMS matrix and allows for locally altering its topography by means of individually addressable integrated heaters. Devices were designed in order to enable the generation of a cavity by the expansion of the composite actuator and are entirely fabricated from low-cost materials using wafer-level processes only. The fabricated devices successfully demonstrated controlled liquid aspiration and release thereafter of liquid volumes ranging from 180 nl to 815 nl.