S. Maruyama, T. Konishi, K. Machida, N. Ishihara, K. Masu, H. Fujita, H. Toshiyoshi
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引用次数: 0
Abstract
We report an interface IC (integrated circuit) to electrostatically drive and measure the tilt-mirror angle by switching the actuator's port to either the driver or charge-sensing circuit in a time-multiplex manner in a period shorter than the mechanical response time to minimize the disturbance of sensing.
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