Contamination Troubleshooting for Microelectronics Packaging

V. Chia, Tiffany Wilkus, Laarni Huerta, Wendy Rivello, Jennifer Jew, Fuhe Li, H. Gotts, I-Hsiang Hsu, S. Anderson
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Abstract

A goal of advanced packaging design performance is to reduce power and to achieve better control of heat and electromagnetic interference. Materials to achieve efficient packaging include the use of gold (Au) wire, copper (Cu) alloy, gold/silver (Au/Ag) plating, solder, low-k epoxy and dry-film polymers, silicones and polyimides. Material purity verification and contamination control during the production process is a prerequisite to ensure high yields in packaging because getting this wrong means throwing away multiple chips. This paper describes an Analytical Decision Tree to guide methodology selection, reviews contamination troubleshooting methodologies, and case studies to resolve process issues.
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微电子封装污染故障排除
先进封装设计性能的一个目标是降低功耗,更好地控制热和电磁干扰。实现高效封装的材料包括使用金(Au)线、铜(Cu)合金、金/银(Au/Ag)电镀、焊料、低钾环氧树脂和干膜聚合物、有机硅和聚酰亚胺。生产过程中的材料纯度验证和污染控制是确保包装高产量的先决条件,因为在这方面出错意味着要扔掉多个芯片。本文描述了一个分析决策树来指导方法选择,审查污染故障排除方法,并通过案例研究来解决过程问题。
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