{"title":"Mass Sensor Based on Thin Film Bulk Acoustic Resonator","authors":"Biyan Wu","doi":"10.1109/BMEI.2009.5305157","DOIUrl":null,"url":null,"abstract":"A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608MHz. This FBAR sensor is applied as humidity sensor. The reproducibility of this sensor’ S11and Q factor are evaluated.","PeriodicalId":6389,"journal":{"name":"2009 2nd International Conference on Biomedical Engineering and Informatics","volume":"18 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2009-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 2nd International Conference on Biomedical Engineering and Informatics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/BMEI.2009.5305157","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608MHz. This FBAR sensor is applied as humidity sensor. The reproducibility of this sensor’ S11and Q factor are evaluated.
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