{"title":"Controlled oxidation of tantalum and aluminium in a radio-frequency-excited glow discharge","authors":"P. L. Worledge, D. White","doi":"10.1088/0508-3443/18/9/418","DOIUrl":null,"url":null,"abstract":"A controlled method of oxidizing thin films of tantalum and aluminium in a radio-frequency-excited glow discharge is described. The oxide films have been assessed as the dielectric in metal-metal-oxide-metal capacitor structures. Reciprocal capacitance varies linearly with the voltage applied to the metal film in the discharge over the range 0 to 48 v. The process is similar to but less efficient than anodization in a liquid electrolyte. Compared with oxide films formed by liquid anodization the electrical properties are poor, probably because of the more energetic conditions in the discharge.","PeriodicalId":9350,"journal":{"name":"British Journal of Applied Physics","volume":"67 1","pages":"1337-1339"},"PeriodicalIF":0.0000,"publicationDate":"1967-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"British Journal of Applied Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/0508-3443/18/9/418","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
A controlled method of oxidizing thin films of tantalum and aluminium in a radio-frequency-excited glow discharge is described. The oxide films have been assessed as the dielectric in metal-metal-oxide-metal capacitor structures. Reciprocal capacitance varies linearly with the voltage applied to the metal film in the discharge over the range 0 to 48 v. The process is similar to but less efficient than anodization in a liquid electrolyte. Compared with oxide films formed by liquid anodization the electrical properties are poor, probably because of the more energetic conditions in the discharge.
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