Advanced Protected Fan-In WLCSP

D. Hackler, E. Prack
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Abstract

With the advent of bumped die new IC packages evolved: for low IO WLCSP (wafer level chip scale package), for high IO FC (flip chip) CBGA (ceramic ball grid array) and PBGA (plastic ball grid array). For low IO, protected CSP is an emerging and rapidly growing market. In 2020 the market exceeded $2B and is ramping to a forecast $2.5B by 2025.1 Initially WLCSP, also known as FI (fan in), packages were built on the wafer with no active side protection evolving to single sided protection from a package built on the wafer2 which transition to redistribution PSB (passivation stress buffer)3, PSBs were used on FC wafers for high IO BGA packages. These provided acceptable performance initially, however as devices became more complex and reliability requirements increased, these processes no longer provided the required reliability. To attain higher IO capability and better reliability performance evolved to CSP4 (non-WL) which allowed larger area for bump distribution and additional protection to the rest of the exposed die surfaces. Fully protected die CSP (without substrates or leadframes) was initially implemented with processes such as M-series utilizing a FO (fan out) process.5 To obtain higher reliability 6-sided die protection afforded by M-series type processes require die reconstitution, expensive tapes, molding, and other operations generally required in a FO process which can feasibly be eliminated in a WLCSP protected FI process. American Semiconductor's Semiconductor-on-Polymer™ (SoP™) 300mm FleX-TM WLCSP is an advanced packaging process optimized for protected fan-in. FleX-TM produces the thinnest and lowest cost protected FI the industry today. Protected FI process innovations can improve performance in power devices, RF switches, die stacking and thin board applications. This article includes background on the evolution of CSP and the comparison of SOTA (state of the art) FI processes including FleX-TM.
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高级保护风扇入式WLCSP
随着凸模的出现,新的IC封装不断发展:用于低IO WLCSP(晶圆级芯片规模封装),用于高IO FC(倒装芯片)CBGA(陶瓷球网格阵列)和PBGA(塑料球网格阵列)。对于低IO,受保护CSP是一个新兴和快速增长的市场。到2020年,市场规模将超过20亿美元,预计到2025年将达到25亿美元。1最初,WLCSP,也称为FI(扇入),封装建立在晶圆上,没有主动侧保护,从建立在晶圆上的封装演变为单侧保护,过渡到再分配PSB(钝化应力缓冲)3,PSB用于FC晶圆上的高IO BGA封装。这些过程最初提供了可接受的性能,但是随着设备变得更加复杂和可靠性要求的增加,这些过程不再提供所需的可靠性。为了获得更高的IO能力和更好的可靠性性能,发展到CSP4(非wl),它允许更大的凹凸分布区域和对其余暴露的模具表面的额外保护。完全保护的模具CSP(没有基板或引线框架)最初是通过使用FO(扇出)工艺的m系列等工艺实现的为了获得m系列工艺提供的更高可靠性的六面模具保护,需要模具重构、昂贵的胶带、成型和其他通常在FO工艺中需要的操作,而这些操作在WLCSP保护的FI工艺中是可以消除的。美国半导体公司的半导体聚合物™(SoP™)300mm FleX-TM WLCSP是一种先进的封装工艺,针对受保护的风扇插入进行了优化。FleX-TM生产当今业界最薄,成本最低的保护FI。受保护的FI工艺创新可以提高功率器件,RF开关,芯片堆叠和薄板应用的性能。本文介绍了CSP发展的背景,以及包括FleX-TM在内的SOTA(最先进的)FI流程的比较。
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