Chun-Yen Kuo, P.-S Chen, K. Chiu, C.-J. Lu, W. Tian
{"title":"Development of new micro gas preconcentrator using novel electroless gold plating process","authors":"Chun-Yen Kuo, P.-S Chen, K. Chiu, C.-J. Lu, W. Tian","doi":"10.1109/TRANSDUCERS.2015.7181209","DOIUrl":null,"url":null,"abstract":"This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2015.7181209","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.