Self aligned MEMS based high-Q disk resonator

V. Singh, A. Amsanpally, K. C. James Raju
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引用次数: 1

Abstract

This paper presents the design of a RF MEMS based disk resonator with high quality factor in the MHz frequency range. High quality factors can be achievable with crystal and SAW devices. But these are off chip components that cannot be miniaturized further to achieve integration with integrated circuits. Hence there is a need for on-chip replacement. It can be achieved by the integration of MEMS disk resonators as they are planar resonators, capable of giving high quality factors in MHz range. This work is focused on investigating the role of basic physical and mechanical properties such as Density, Poisson's ratio, Young's modulus, Acoustic velocity and Acoustic impedance of various materials and geometric parameters, (i.e. radius of the disk and thickness of the disk) on the resonant frequency and Q value of the disk resonators. By proper optimization of these parameters, high quality factor has been achieved. By studying the relative importance of each of these factors, some new combination of materials to improve performance and reliability of planar resonators has been suggested.
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基于MEMS的自对准高q盘谐振器
本文设计了一种基于射频MEMS的圆盘谐振器,在MHz频率范围内具有高品质因数。使用晶体和SAW器件可以实现高质量因子。但这些都是片外元件,无法进一步小型化以实现与集成电路的集成。因此,有必要进行芯片上的替换。这可以通过集成MEMS磁盘谐振器来实现,因为它们是平面谐振器,能够在MHz范围内提供高质量因子。本文主要研究了各种材料的密度、泊松比、杨氏模量、声速、声阻抗等基本物理力学性能和几何参数(即圆盘半径和圆盘厚度)对圆盘谐振器谐振频率和Q值的影响。通过对这些参数的合理优化,获得了较高的质量因数。通过研究这些因素的相对重要性,提出了一些新的材料组合来提高平面谐振器的性能和可靠性。
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